| Presentation | 2009-05-14 Preparation of TiO_2 thin films by RF magnetron sputtering method and their photocatalytic properties Tatsuya Ito, Tatsuya Endo, Masaaki Isai, Tetsuya Sakai, Yoichi Hoshi, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Low-temperature preparation of the TiO_2 thin films was examined by using a RF magnetron sputtering method was examined. The thin film generated with the RF magnetron sputtering method. TiO_2 films of anatase structure could be prepared on the non-heated glass substrates. The photocatalytic properties of films were significant in the films prepared under the sputtering atmosphere of 10Pa rather than 5Pa. For the organic matter resolution characteristic, both anatase and rutile crystal structures showed high activities. For the optical excitation hydrophilicity characteristic, the anatase crystal was decent. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | TiO_2 thin film / RF magnetron sputtering / Photocatalyst |
| Paper # | ED2009-22,CPM2009-12,SDM2009-12 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
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| Conference Date | 2009/5/7(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Preparation of TiO_2 thin films by RF magnetron sputtering method and their photocatalytic properties |
| Sub Title (in English) | |
| Keyword(1) | TiO_2 thin film |
| Keyword(2) | RF magnetron sputtering |
| Keyword(3) | Photocatalyst |
| 1st Author's Name | Tatsuya Ito |
| 1st Author's Affiliation | Graduate School of Engineering, Shizuoka University() |
| 2nd Author's Name | Tatsuya Endo |
| 2nd Author's Affiliation | Graduate School of Engineering, Shizuoka University |
| 3rd Author's Name | Masaaki Isai |
| 3rd Author's Affiliation | Graduate School of Engineering, Shizuoka University |
| 4th Author's Name | Tetsuya Sakai |
| 4th Author's Affiliation | Graduate School of Engineering, Tokyo Polytechnic University |
| 5th Author's Name | Yoichi Hoshi |
| 5th Author's Affiliation | Graduate School of Engineering, Tokyo Polytechnic University |
| Date | 2009-05-14 |
| Paper # | ED2009-22,CPM2009-12,SDM2009-12 |
| Volume (vol) | vol.109 |
| Number (no) | 23 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |