| Presentation | 2009-04-24 Metal Induced Lateral Crystallization of PECVD a-Si and Its Impact on TFT Performance Shintaro KANOH, Sho NAGATA, Gou NAKAGAWA, Tanemasa ASANO, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In the case of solid phase crystallization of amorphous Si (a-Si) deposited by plasma-enhanced chemical vapor deposition (PECVD), it is difficult to clearly observe the spontaneous nucleation and growth in contrast to the case of a-Si films deposited by evaporation in ultra-high vacuum. The polycrystalline films thus crystallized from PECVD deposited a-Si films show small carrier mobility when they are applied to TFTs. In this paper, metal induced lateral crystallization (MILC) has been applied to a-Si films prepared by PECVD. It has better carrier mobility and a similar growth characteristic to the film crystallized from a-Si deposited in ultra-high vacuum. Results of an attempt of grain filtering carried out by patterning a-Si films prior to MILC are also described. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | polycrystalline silicon / thin film transistor / plasma-enhanced chemical vapor deposition / metal induced lateral crystallization / MILC |
| Paper # | SDM2009-7,OME2009-7 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2009/4/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Metal Induced Lateral Crystallization of PECVD a-Si and Its Impact on TFT Performance |
| Sub Title (in English) | |
| Keyword(1) | polycrystalline silicon |
| Keyword(2) | thin film transistor |
| Keyword(3) | plasma-enhanced chemical vapor deposition |
| Keyword(4) | metal induced lateral crystallization |
| Keyword(5) | MILC |
| 1st Author's Name | Shintaro KANOH |
| 1st Author's Affiliation | Graduate School of Information Science and Electrical Engineering, Kyushu University() |
| 2nd Author's Name | Sho NAGATA |
| 2nd Author's Affiliation | Graduate School of Information Science and Electrical Engineering, Kyushu University |
| 3rd Author's Name | Gou NAKAGAWA |
| 3rd Author's Affiliation | Graduate School of Information Science and Electrical Engineering, Kyushu University |
| 4th Author's Name | Tanemasa ASANO |
| 4th Author's Affiliation | Graduate School of Information Science and Electrical Engineering, Kyushu University |
| Date | 2009-04-24 |
| Paper # | SDM2009-7,OME2009-7 |
| Volume (vol) | vol.109 |
| Number (no) | 20 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |