| Presentation | 2009-04-17 MEMS Mirror Array Module for Wavelength Selective Switches (WSS) Mitsuo USUI, Shingo UCHIYAMA, Etsu HASHIMOTO, Koichi HADAMA, Yuzo ISHII, Nobuaki MATSUURA, Tomomi SAKATA, Nobihiro SHIMOYAMA, Tohru MATSUURA, Fusao SHIMOKAWA, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We developed a new two-axis microelectromechanical-systems (MEMS) mirror array module for wavelength selective switches (WSS). This MEMS mirror array module has a suitable structure for narrow-pitch and high fill-factor. We designed a new electrode structure to reduce electric interference between adjacent channels. To fabricate the MEMS mirror array module, we developed a small sealing package and a high density, flexible, electrical interface. We fabricated a 50ch-MEMS mirror array module using these technologies, and confirmed that the module has good characteristics. We also confirmed the electric interference reduction in the fabricated MEMS mirror array module. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Wavelength Selective Switches (WSS) / MEMS / Mirror Array / Electrical Interference / Packaging Technology |
| Paper # | R2009-7,CPM2009-7,OPE2009-7 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2009/4/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | MEMS Mirror Array Module for Wavelength Selective Switches (WSS) |
| Sub Title (in English) | |
| Keyword(1) | Wavelength Selective Switches (WSS) |
| Keyword(2) | MEMS |
| Keyword(3) | Mirror Array |
| Keyword(4) | Electrical Interference |
| Keyword(5) | Packaging Technology |
| 1st Author's Name | Mitsuo USUI |
| 1st Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation() |
| 2nd Author's Name | Shingo UCHIYAMA |
| 2nd Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
| 3rd Author's Name | Etsu HASHIMOTO |
| 3rd Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
| 4th Author's Name | Koichi HADAMA |
| 4th Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
| 5th Author's Name | Yuzo ISHII |
| 5th Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
| 6th Author's Name | Nobuaki MATSUURA |
| 6th Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
| 7th Author's Name | Tomomi SAKATA |
| 7th Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
| 8th Author's Name | Nobihiro SHIMOYAMA |
| 8th Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
| 9th Author's Name | Tohru MATSUURA |
| 9th Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
| 10th Author's Name | Fusao SHIMOKAWA |
| 10th Author's Affiliation | NTT Microsystem Integration Laboratories, NTT Corporation |
| Date | 2009-04-17 |
| Paper # | R2009-7,CPM2009-7,OPE2009-7 |
| Volume (vol) | vol.109 |
| Number (no) | 7 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |