| Presentation | 2009-02-26 Magnetic properties of Mn-implanted SOI layers Y. Miyazaki, Y. Ono, H. Kageshima, M. Nagase, A. Fujiwara, E. Ohta, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Thermally annealed Mn-implanted thin SOI layers are prepared and investigated by High Angular Dark Field Scanning Transmission Electron Microscope (HAADF-STEM), Atomic Force Microscope (AFM), Energy Dispersive X-ray Spectrometer (EDX), and the magnetic properties are measured by Superconducting quantum interference device (SQUID) magnetometer. Mn-silicide particles are observed in SOI layer, and the particles grew with increasing annealing temperature. Paramagnetism and weak superparamagnetism, whose magnetization is dependent on the temperature, are observed. Moreover, we successfully perform, by using KOH solution, a selective etching of Si, keeping Mn-silicide particles on the top layer, and observe enhancement of the magnetization. This strongly suggests that the particle surface plays an important role in this system. |
| Keyword(in Japanese) | (See Japanese page) |
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| Paper # | ED2008-225,SDM2008-217 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2009/2/19(1days) |
| Place (in Japanese) | (See Japanese page) |
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| Topics (in Japanese) | (See Japanese page) |
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| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Magnetic properties of Mn-implanted SOI layers |
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| 1st Author's Name | Y. Miyazaki |
| 1st Author's Affiliation | NTT Basic Research Labs.:Keio Univ.() |
| 2nd Author's Name | Y. Ono |
| 2nd Author's Affiliation | NTT Basic Research Labs. |
| 3rd Author's Name | H. Kageshima |
| 3rd Author's Affiliation | NTT Basic Research Labs. |
| 4th Author's Name | M. Nagase |
| 4th Author's Affiliation | NTT Basic Research Labs. |
| 5th Author's Name | A. Fujiwara |
| 5th Author's Affiliation | NTT Basic Research Labs. |
| 6th Author's Name | E. Ohta |
| 6th Author's Affiliation | Keio Univ. |
| Date | 2009-02-26 |
| Paper # | ED2008-225,SDM2008-217 |
| Volume (vol) | vol.108 |
| Number (no) | 437 |
| Page | pp.pp.- |
| #Pages | 5 |
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