| Presentation | 2008-11-27 Low-pressure HVPE growth and characterization of AlN on period-trench-patterned substrate Yusuke Katagiri, Kazuteru Okuura, Jiejun Wu, Hideto Miyake, Kazumasa Hiramatsu, Tetsuya Ezaki, Noriyuki Kuwano, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In the case of HVPE growth AlN on Sapphire substrate, the formation of cracks due to the large difference in thermal expansion coefficient between AlN and sapphire is considered a critical issue. In this study, AlN layer was grown on period-trench-pattered substrate by low pressure HVPE. AlN layer on period-trench-patterned substrate had crack-free. The typical full-widths at half-maximum (FWHMs) of X-ray rocking curves (XRC) for the (0002) and (10-10) diffractions of the AlN layer on period-trench-patterned AlN/Sapphire substrate were 132 and 594 arcsec, respectively. Compared with the AlN layer grown AlN/Sapphire substrate without period-trench-patterned, it was confirmed that the FWHMs of XRC of the AlN layer on period-trench-patterned AlN/Sapphire substrate decreased about a third. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | AlN / LP-HVPE |
| Paper # | ED2008-166,CPM2008-115,LQE2008-110 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2008/11/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Low-pressure HVPE growth and characterization of AlN on period-trench-patterned substrate |
| Sub Title (in English) | |
| Keyword(1) | AlN |
| Keyword(2) | LP-HVPE |
| 1st Author's Name | Yusuke Katagiri |
| 1st Author's Affiliation | Faculty of Eng., Mie University() |
| 2nd Author's Name | Kazuteru Okuura |
| 2nd Author's Affiliation | Faculty of Eng., Mie University |
| 3rd Author's Name | Jiejun Wu |
| 3rd Author's Affiliation | Faculty of Eng., Mie University |
| 4th Author's Name | Hideto Miyake |
| 4th Author's Affiliation | Faculty of Eng., Mie University |
| 5th Author's Name | Kazumasa Hiramatsu |
| 5th Author's Affiliation | Faculty of Eng., Mie University |
| 6th Author's Name | Tetsuya Ezaki |
| 6th Author's Affiliation | Interdisciplinary Graduate School of Engineering Sciences, Kyusyu University |
| 7th Author's Name | Noriyuki Kuwano |
| 7th Author's Affiliation | Art, Science and Technology Center for Cooperative Reserch, Kyusyu University |
| Date | 2008-11-27 |
| Paper # | ED2008-166,CPM2008-115,LQE2008-110 |
| Volume (vol) | vol.108 |
| Number (no) | 323 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |