| Presentation | 2008-11-27 Electroluminescence study of GaN based devices with several hundreds nano-scale periodic structure fabricated by nano-imprint technique Mitsuaki TOHNO, JING Zhang, Yoshiki NAOI, Shiro SAKAI, Junzo WACHI, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have fabricated several hundreds nano-scale periodic structure on p-GaN by using nano-imprint technique and RIE technique with column shape. We used BCl_3 and Cl_2 gas for etching of GaN and Ar gas for etching of Ni. The diameter, period and height of these structures were 136nm/200nm/96nm, 184nm/297nm/90nm, 232nm/400nm/94nm and 284nm/498nm/103nm, respectively. After deposition of p and n electrode, emission study by current injection was performed. The peak wavelength was 415nm. The output light from 200nm and 300nm period samples had 3-fold rotational symmetry and 6-fold rotational symmetry for 395nm period sample. The 498nm period samples had symmetrical output light. The direction of output light was corresponded to the direction of nano-structures whose periods had integer multiple of the half-wave length in GaN. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Nano-imprint / GaN / periodic structure / Electroluminescence |
| Paper # | ED2008-158,CPM2008-107,LQE2008-102 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2008/11/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Electroluminescence study of GaN based devices with several hundreds nano-scale periodic structure fabricated by nano-imprint technique |
| Sub Title (in English) | |
| Keyword(1) | Nano-imprint |
| Keyword(2) | GaN |
| Keyword(3) | periodic structure |
| Keyword(4) | Electroluminescence |
| 1st Author's Name | Mitsuaki TOHNO |
| 1st Author's Affiliation | Faculty of Engineering, The University of Tokushima() |
| 2nd Author's Name | JING Zhang |
| 2nd Author's Affiliation | Faculty of Engineering, The University of Tokushima |
| 3rd Author's Name | Yoshiki NAOI |
| 3rd Author's Affiliation | Faculty of Engineering, The University of Tokushima |
| 4th Author's Name | Shiro SAKAI |
| 4th Author's Affiliation | Faculty of Engineering, The University of Tokushima |
| 5th Author's Name | Junzo WACHI |
| 5th Author's Affiliation | SCIVAX Corporation |
| Date | 2008-11-27 |
| Paper # | ED2008-158,CPM2008-107,LQE2008-102 |
| Volume (vol) | vol.108 |
| Number (no) | 323 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |