Presentation | 2008-11-27 Growth and Characterization of M-plane InN on LiAlO_2 Substrate by RF-MBE Yusuke TAKAGI, Hirokazu NOZAWA, Tomohiro YAMAGUCHI, Tsutomu ARAKI, Yasushi NANISHI, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | In this study, we report the growth and characterization of M-plane InN films on LiAlO_2 (100) substrates by radio-frequency plasma assisted molecular beam epitaxy (RF-MBE). InN films were grown directly on the substrate. Pure M-plane InN was successfully grown at 450℃ and under slightly In-rich condition. However, the incorporation of C-plane InN phases were confirmed in M-plane InN films at low temperature or under N-rich condition. Therefore, it is important to control the growth temperature and V/III ratio for the growth of pure M-plane InN. We also characterized the microstructure of the pure M-plane InN on LiAlO_2 (100) by using transmission electron microscopy (TEM). |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | InN / non-polar / MBE / LiAlO_2 / TEM |
Paper # | ED2008-157,CPM2008-106,LQE2008-101 |
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Conference Information | |
Committee | LQE |
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Conference Date | 2008/11/20(1days) |
Place (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Lasers and Quantum Electronics (LQE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Growth and Characterization of M-plane InN on LiAlO_2 Substrate by RF-MBE |
Sub Title (in English) | |
Keyword(1) | InN |
Keyword(2) | non-polar |
Keyword(3) | MBE |
Keyword(4) | LiAlO_2 |
Keyword(5) | TEM |
1st Author's Name | Yusuke TAKAGI |
1st Author's Affiliation | Dept. of Photonics, Ritsumeikan University() |
2nd Author's Name | Hirokazu NOZAWA |
2nd Author's Affiliation | Dept. of Photonics, Ritsumeikan University |
3rd Author's Name | Tomohiro YAMAGUCHI |
3rd Author's Affiliation | Res. Org. of Sci. & Eng., Ritsumeikan University |
4th Author's Name | Tsutomu ARAKI |
4th Author's Affiliation | Dept. of Photonics, Ritsumeikan University |
5th Author's Name | Yasushi NANISHI |
5th Author's Affiliation | Dept. of Photonics, Ritsumeikan University |
Date | 2008-11-27 |
Paper # | ED2008-157,CPM2008-106,LQE2008-101 |
Volume (vol) | vol.108 |
Number (no) | 323 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |