Presentation 2009-01-30
Fabrication of micromirror array embedded in PLC and stacked integration of in-line power monitor
Hiroshi YAMAZAKI, Ikuo OGAWA, Masahiro YANAGISAWA, Kei WATANABE, Akimasa KANEKO,
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Abstract(in English) Regarding advanced optical network systems, there is a strong demand for optical modules which integrates multiple optical functions such as multiplexing/demultiplexing, switching and monitoring. Silica-based planar lightwave circuits(PLCs) have clear advantages for use in such integrated modules because they provide low optical loss, high design flexibility, and high reliability. One of the main issues in the development of PLC-based integrated modules is how to integrate the PLC with other devices, such as photodiodes(PDs). In this paper, we report the fabrication of out-of-plane micromirrors in PLCs and integration of PDs using those micromirrors.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) PLC / micromirror / CSP-PD / in-line optical monitor / multi-functional integrated optical module
Paper # PN2008-70,OPE2008-173,LQE2008-170
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Conference Information
Committee OPE
Conference Date 2009/1/22(1days)
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Paper Information
Registration To Optoelectronics (OPE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication of micromirror array embedded in PLC and stacked integration of in-line power monitor
Sub Title (in English)
Keyword(1) PLC
Keyword(2) micromirror
Keyword(3) CSP-PD
Keyword(4) in-line optical monitor
Keyword(5) multi-functional integrated optical module
1st Author's Name Hiroshi YAMAZAKI
1st Author's Affiliation NTT Photonics Labs., NTT Corporation()
2nd Author's Name Ikuo OGAWA
2nd Author's Affiliation NTT Photonics Labs., NTT Corporation
3rd Author's Name Masahiro YANAGISAWA
3rd Author's Affiliation NTT Electronics Corporation
4th Author's Name Kei WATANABE
4th Author's Affiliation NTT Photonics Labs., NTT Corporation
5th Author's Name Akimasa KANEKO
5th Author's Affiliation NTT Photonics Labs., NTT Corporation
Date 2009-01-30
Paper # PN2008-70,OPE2008-173,LQE2008-170
Volume (vol) vol.108
Number (no) 418
Page pp.pp.-
#Pages 4
Date of Issue