| Presentation | 2009-01-30 Improvement of Filtering Characteristics of Bragg Grating Formed on Silicon Waveguide by Deep-RIE Etching Junya MATSUI, Hiroki TAKAHASHI, Nan XIE, Katsuyuki UTAKA, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | With the increase of communication capacity by WDM, low-cost and high-performance optical devices using Si waveguide on silicon-on-insulator (SOI) substrates attract attention. So far we fabricated the Michelson Interferometer-type filter which works as a WDM interleaver consisting of large coupling-coefficient Si grating made by Deep-RIE. In this paper, we report the improvement of grating characteristics, such as a large transmission contrast of about 25dB and a band width of about 6nm for the grating by deep grating with reduced roughness. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | WDM / SOI / Bragg Grating / Filter Device / Deep-RIE |
| Paper # | PN2008-69,OPE2008-172,LQE2008-169 |
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| Conference Information | |
| Committee | OPE |
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| Conference Date | 2009/1/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Optoelectronics (OPE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Improvement of Filtering Characteristics of Bragg Grating Formed on Silicon Waveguide by Deep-RIE Etching |
| Sub Title (in English) | |
| Keyword(1) | WDM |
| Keyword(2) | SOI |
| Keyword(3) | Bragg Grating |
| Keyword(4) | Filter Device |
| Keyword(5) | Deep-RIE |
| 1st Author's Name | Junya MATSUI |
| 1st Author's Affiliation | Faculty of Science and Engineering, Waseda University() |
| 2nd Author's Name | Hiroki TAKAHASHI |
| 2nd Author's Affiliation | Faculty of Science and Engineering, Waseda University |
| 3rd Author's Name | Nan XIE |
| 3rd Author's Affiliation | Faculty of Science and Engineering, Waseda University |
| 4th Author's Name | Katsuyuki UTAKA |
| 4th Author's Affiliation | Faculty of Science and Engineering, Waseda University |
| Date | 2009-01-30 |
| Paper # | PN2008-69,OPE2008-172,LQE2008-169 |
| Volume (vol) | vol.108 |
| Number (no) | 418 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |