| Presentation | 2009-01-15 Low Loss Coplanar Waveguide Structure on High-Resistivity Silicon Substrate Takehiko MAKITA, Isao TAMAI, Shinichi HOSHI, Shohei SEKI, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have fabricated and evaluated attenuation characteristics of coplanar waveguide (CPW) on high-resisitivity silicon substrate in order to realize low loss CPW whose attenuation constant is as low as that on semi-insulating compound semiconductor for microwave and millimeter wave band. When an insulated SiN layer was inserted between the CPW and high-resistivity silicon substrate, it was found that the attenuation constant exceeded 1dB/mm at 1GHz. The larger attenuation can be explained well by assuming a low resistivity layer between silicon substrate and insulated layer according to the equivalent circuit of the CPW. The CPW on high-resistivity silicon substrate with attenuation constant of less than 1dB/mm could be obtained by etching the insulated layer between the center strip and both side ground planes, which is comparable with that of CPW formed on the semi-insulating compound semiconductor substrate. This CPW structure enables high-resistivity silicon substrate to be adapted for multichip module technology. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Coplanar Waveguide / High-Resistivity Silicon Substrate / Low Loss |
| Paper # | ED2008-209,MW2008-174 |
| Date of Issue |
| Conference Information | |
| Committee | MW |
|---|---|
| Conference Date | 2009/1/7(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Microwaves (MW) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Low Loss Coplanar Waveguide Structure on High-Resistivity Silicon Substrate |
| Sub Title (in English) | |
| Keyword(1) | Coplanar Waveguide |
| Keyword(2) | High-Resistivity Silicon Substrate |
| Keyword(3) | Low Loss |
| 1st Author's Name | Takehiko MAKITA |
| 1st Author's Affiliation | Corporate Research & Development Center, Oki Electric Industry Co., Ltd.() |
| 2nd Author's Name | Isao TAMAI |
| 2nd Author's Affiliation | Corporate Research & Development Center, Oki Electric Industry Co., Ltd. |
| 3rd Author's Name | Shinichi HOSHI |
| 3rd Author's Affiliation | Corporate Research & Development Center, Oki Electric Industry Co., Ltd. |
| 4th Author's Name | Shohei SEKI |
| 4th Author's Affiliation | Corporate Research & Development Center, Oki Electric Industry Co., Ltd. |
| Date | 2009-01-15 |
| Paper # | ED2008-209,MW2008-174 |
| Volume (vol) | vol.108 |
| Number (no) | 377 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |