| Presentation | 2008-11-07 Electrical properties of bottom contact pentacene FET on 3D processed S-D electrodes Tatsuya FUJIMORI, Yusuke URA, Eiji ITOH, Keiichi MIYAIRI, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have fabricated an unique bottom contact type pentacene field effect transistor (FET) on 3-D structured source-drain electrodes having a 200nm (or 400nm)-thick polyimide layer underneath S-D electrodes, and on aluminum oxide insulator. The unwanted bare polyimide layer was removed by a self-alignment dry etch in O_2 plasma using source-drain electrodes as a mask. The field effect mobility of this new type bottom contact FET was much higher than that of traditional bottom contact pentacene FET probably due to the improved morphology of pentacene film at the region close to Au/pentacene interface. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | OFET / Pentacene / Al_2O_3 / Bottom contact |
| Paper # | OME2008-61 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2008/10/31(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Electrical properties of bottom contact pentacene FET on 3D processed S-D electrodes |
| Sub Title (in English) | |
| Keyword(1) | OFET |
| Keyword(2) | Pentacene |
| Keyword(3) | Al_2O_3 |
| Keyword(4) | Bottom contact |
| 1st Author's Name | Tatsuya FUJIMORI |
| 1st Author's Affiliation | Faculty of Engineering, Shinshu University() |
| 2nd Author's Name | Yusuke URA |
| 2nd Author's Affiliation | / / |
| 3rd Author's Name | Eiji ITOH |
| 3rd Author's Affiliation | |
| 4th Author's Name | Keiichi MIYAIRI |
| 4th Author's Affiliation | |
| Date | 2008-11-07 |
| Paper # | OME2008-61 |
| Volume (vol) | vol.108 |
| Number (no) | 280 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |