| Presentation | 2008-11-28 Simulation of Bending Deformation and Two-dimensional Electron Gas Density in AlGaN/GaN Hetero-Structures Hajime TSUKAHARA, Seiji NAKAMURA, Tsugunori OKUMURA, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have examined the effect on a two-dimensional electron gas (2DEG) in AlGaN/GaN hetero structures by using the "micro-origami" method. In this study, lattice strain, bending deformation, and variations of piezoelectric charge as well as 2DEG density were analyzed for a basic cantilever of the bimetal structure. These simulations were performed by using the finite element method and the finite difference method. As a result, the 2DEG density at the Al_<0.2>Ga_<0.8>N/GaN hetero-interface was found to decrease approximately 37%. The result suggests that the 2DEG density is controllable in the micro-origami type of MEMS structures. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | AlGaN/GaN / Piezoelectric charges / 2DEG / lattice strain / MEMS / micro-origami |
| Paper # | ED2008-182,CPM2008-131,LQE2008-126 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
|---|---|
| Conference Date | 2008/11/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Simulation of Bending Deformation and Two-dimensional Electron Gas Density in AlGaN/GaN Hetero-Structures |
| Sub Title (in English) | |
| Keyword(1) | AlGaN/GaN |
| Keyword(2) | Piezoelectric charges |
| Keyword(3) | 2DEG |
| Keyword(4) | lattice strain |
| Keyword(5) | MEMS |
| Keyword(6) | micro-origami |
| 1st Author's Name | Hajime TSUKAHARA |
| 1st Author's Affiliation | Department of Electrical and Electronic Engineering, Graduate School of Science and Engineering, Tokyo Metropolitan University() |
| 2nd Author's Name | Seiji NAKAMURA |
| 2nd Author's Affiliation | / |
| 3rd Author's Name | Tsugunori OKUMURA |
| 3rd Author's Affiliation | |
| Date | 2008-11-28 |
| Paper # | ED2008-182,CPM2008-131,LQE2008-126 |
| Volume (vol) | vol.108 |
| Number (no) | 321 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |