| Presentation | 2008-08-05 Application of silicon field emitter arrays for space charge compensation of low energy ion beam Mitsuaki TAKEUCHI, Yasuhito GOTOH, Hiroshi TSUJI, Shigeki SAKAI, Tsunenobu KIMOTO, Junzo ISHIKAWA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We demonstrated a space charge compensation by using a surface-carbonized silicon field emitter array (Si:C-FEA). The Si:C-FEA showed good emission properties in Ne gas atmosphere of 2.0×10^<-4>Pa. As a result, decrease of the beam divergence was observed in a case of the electron supply. It was found that the Si:C-FEA is possible candidate for the SCC of the ion-implantation. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Ion implantation / space charge compensation / field emitter arrays / silicon |
| Paper # | ED2008-119 |
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| Committee | ED |
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| Conference Date | 2008/7/28(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Application of silicon field emitter arrays for space charge compensation of low energy ion beam |
| Sub Title (in English) | |
| Keyword(1) | Ion implantation |
| Keyword(2) | space charge compensation |
| Keyword(3) | field emitter arrays |
| Keyword(4) | silicon |
| 1st Author's Name | Mitsuaki TAKEUCHI |
| 1st Author's Affiliation | JST Innovation plaza Kyoto() |
| 2nd Author's Name | Yasuhito GOTOH |
| 2nd Author's Affiliation | Kyoto University |
| 3rd Author's Name | Hiroshi TSUJI |
| 3rd Author's Affiliation | Kyoto University |
| 4th Author's Name | Shigeki SAKAI |
| 4th Author's Affiliation | Nissin Ion Equipment, Co. Ltd. |
| 5th Author's Name | Tsunenobu KIMOTO |
| 5th Author's Affiliation | Kyoto University |
| 6th Author's Name | Junzo ISHIKAWA |
| 6th Author's Affiliation | Kyoto University |
| Date | 2008-08-05 |
| Paper # | ED2008-119 |
| Volume (vol) | vol.108 |
| Number (no) | 177 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |