Presentation 2008-08-04
Electron emission from nanocrystalline silicon based MOS cathodes
Hidetaka SHIMAWAKI, Yo KIDA, Yoichiro NEO, Hidenori MIMURA, Katsuhisa MURAKAMI, Fujio WAKAYA, Mikio TAKAI,
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Abstract(in English) Emission characteristics of planar cathodes based on nanocrystalline Si covered with a thin oxide film have been studied. The electron emission occurred at the gate voltage higher than the work function of the Au gate, and the emission efficiency was improved up to 4% by reducing the thickness of Au electrode. A lot of nanoholes in the thin Au film were observed, suggesting emission included electrons directly emitted from nanocrystalline aligned under nanoholes. The energy distribution of emitted electron is also discussed.
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Keyword(in English) MOS / tunneling cathode / field emitter / electron emission / nanocrystalline silicon
Paper # ED2008-112
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Committee ED
Conference Date 2008/7/28(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
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Title (in English) Electron emission from nanocrystalline silicon based MOS cathodes
Sub Title (in English)
Keyword(1) MOS
Keyword(2) tunneling cathode
Keyword(3) field emitter
Keyword(4) electron emission
Keyword(5) nanocrystalline silicon
1st Author's Name Hidetaka SHIMAWAKI
1st Author's Affiliation Department of Electrical and Electronic Engineering, Hachinohe Institute of Technology()
2nd Author's Name Yo KIDA
2nd Author's Affiliation Department of Electrical and Electronic Engineering, Hachinohe Institute of Technology
3rd Author's Name Yoichiro NEO
3rd Author's Affiliation Research Institute of Electronics, Shizuoka University
4th Author's Name Hidenori MIMURA
4th Author's Affiliation Research Institute of Electronics, Shizuoka University
5th Author's Name Katsuhisa MURAKAMI
5th Author's Affiliation Center for Quantum Science and Technology under Extreme Conditions, Osaka University
6th Author's Name Fujio WAKAYA
6th Author's Affiliation Center for Quantum Science and Technology under Extreme Conditions, Osaka University
7th Author's Name Mikio TAKAI
7th Author's Affiliation Center for Quantum Science and Technology under Extreme Conditions, Osaka University
Date 2008-08-04
Paper # ED2008-112
Volume (vol) vol.108
Number (no) 177
Page pp.pp.-
#Pages 6
Date of Issue