| Presentation | 2008-09-25 Development of Micro-LFB Ultrasonic Device Jun-ichi KUSHIBIKI, Yuji OHASHI, Mototaka ARAKAWA, Tomoya TANAKA, Sho YOSHIDA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A micro line-focus-beam (LFB) ultrasonic device was developed to improve spatial resolution of the LFB ultrasonic material characterization (UMC) system which is capable of quantitatively evaluating various solid materials, including single crystals, by measuring the phase velocity of leaky surface acoustic waves (LSAWs) propagating on a water-loaded specimen surface. A different point from the normal-LFB device was that the micro-LFB device had a cylindrically convex surface with a large curvature radius for fabricating a ZnO-film transducer. We evaluated spatial resolution of the device at 225MHz by measuring focused acoustic fields using a point-focus-beam ultrasonic device as a detecting probe. 3dB-down width of the acoustic fields along unfocused direction (perpendicular to the LSAW propagation direction) was improved to be 0.26mm for the micro-LFB device, as compared with that of 0.92mm for the normal-LFB device. We also verify a capability of anisotropy detection through measurements of angular dependence of LSAW velocities for anisotropic crystal. LSAW velocity distributions measured for a Z-cut ZnO crystal clearly showed that the micro-LFB device could detect velocity variations and inhomogeneities which could not be observed by the normal-LFB device. This device will be useful for characterizing small precious samples. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | line-focus-beam ultrasonic material characterization system / micro-LFB ultrasonic device / spatial resolution / acoustic field / leaky surface acoustic wave velocity |
| Paper # | US2008-33 |
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| Conference Information | |
| Committee | US |
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| Conference Date | 2008/9/18(1days) |
| Place (in Japanese) | (See Japanese page) |
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| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Ultrasonics (US) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of Micro-LFB Ultrasonic Device |
| Sub Title (in English) | |
| Keyword(1) | line-focus-beam ultrasonic material characterization system |
| Keyword(2) | micro-LFB ultrasonic device |
| Keyword(3) | spatial resolution |
| Keyword(4) | acoustic field |
| Keyword(5) | leaky surface acoustic wave velocity |
| 1st Author's Name | Jun-ichi KUSHIBIKI |
| 1st Author's Affiliation | Graduate School of Engineering, Tohoku University() |
| 2nd Author's Name | Yuji OHASHI |
| 2nd Author's Affiliation | Graduate School of Engineering, Tohoku University |
| 3rd Author's Name | Mototaka ARAKAWA |
| 3rd Author's Affiliation | Graduate School of Engineering, Tohoku University |
| 4th Author's Name | Tomoya TANAKA |
| 4th Author's Affiliation | Graduate School of Engineering, Tohoku University |
| 5th Author's Name | Sho YOSHIDA |
| 5th Author's Affiliation | Graduate School of Engineering, Tohoku University |
| Date | 2008-09-25 |
| Paper # | US2008-33 |
| Volume (vol) | vol.108 |
| Number (no) | 212 |
| Page | pp.pp.- |
| #Pages | 6 |
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