| Presentation | 2008-07-10 3-dimensional Terraced NAND (3D TNAND) Flash Memory(Session4A: Nonvolatile Memory) Yoon Kim, Gil-Seong Lee, Jong Duk Lee, Hyungcheol Shin, Byung-Gook Park, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We propose a 3-dimensional terraced NAND flash memory. It has a vertical channel so it is possible to make a long enough channel in 1F^2 size. And it has 3-dimensional structure whose channel is connected vertically along with two stairs. So we can obtain high density as in the stacked array structure, without silicon stacking process. We can make NAND flash memory with 3F^2 cell size. Using SILVACO ATLAS simulation, we study terraced NAND flash memory characteristics such as program, erase, and read. Also, its fabrication method is proposed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | NAND / flash memory / stacked NAND / vertical channel |
| Paper # | ED2008-56,SDM2008-75 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2008/7/2(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | 3-dimensional Terraced NAND (3D TNAND) Flash Memory(Session4A: Nonvolatile Memory) |
| Sub Title (in English) | |
| Keyword(1) | NAND |
| Keyword(2) | flash memory |
| Keyword(3) | stacked NAND |
| Keyword(4) | vertical channel |
| 1st Author's Name | Yoon Kim |
| 1st Author's Affiliation | Inter-university Semiconductor Research Center and School of Electrical Engineering, Seoul National University() |
| 2nd Author's Name | Gil-Seong Lee |
| 2nd Author's Affiliation | Inter-university Semiconductor Research Center and School of Electrical Engineering, Seoul National University |
| 3rd Author's Name | Jong Duk Lee |
| 3rd Author's Affiliation | Inter-university Semiconductor Research Center and School of Electrical Engineering, Seoul National University |
| 4th Author's Name | Hyungcheol Shin |
| 4th Author's Affiliation | Inter-university Semiconductor Research Center and School of Electrical Engineering, Seoul National University |
| 5th Author's Name | Byung-Gook Park |
| 5th Author's Affiliation | Inter-university Semiconductor Research Center and School of Electrical Engineering, Seoul National University |
| Date | 2008-07-10 |
| Paper # | ED2008-56,SDM2008-75 |
| Volume (vol) | vol.108 |
| Number (no) | 122 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |