| Presentation | 2008-07-18 RF MEMS for Reconfigurable CMOS Radio Kazuya MASU, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | MEMS (Micro Electro Mechanical Systems) technology have produced not only micro-machine, but also novel devices and markets, such as accelerometers, pressure sensor, DMD (Digital Micromirror Device), etc. On the other hand, CMOS performance have become high speed, low consumption power, low cost according to dimensional miniaturization. During CMOS evolution, the concept of "Integration" has produced. However, further high functionality and performance with cost reduction become difficult by the simple scaling and miniaturization. "Many-Function Integration", "Different Material Integration", and "Heterogeneous Integration", will become important. In this paper, we discussed the recent progress of RF MEMS technology. It will be pointed out that we have to discuss what is "CMOS compatibility". CMOS compatibility should be discussed (1) Process level (Surface MEMS, Bulk MEMS), (2)Packaging lvel, (3) Signal level, (4) Reliability, Yield and Testing level, (5) Design level (CAD). |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MEMS / RF CMOS / Variable passive devices / multiband transceiver / reconfigurable RF circuit |
| Paper # | SDM2008-144,ICD2008-54 |
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| Conference Information | |
| Committee | ICD |
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| Conference Date | 2008/7/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | RF MEMS for Reconfigurable CMOS Radio |
| Sub Title (in English) | |
| Keyword(1) | MEMS |
| Keyword(2) | RF CMOS |
| Keyword(3) | Variable passive devices |
| Keyword(4) | multiband transceiver |
| Keyword(5) | reconfigurable RF circuit |
| 1st Author's Name | Kazuya MASU |
| 1st Author's Affiliation | Integrated Research Institute, Tokyo Institute of Technology() |
| Date | 2008-07-18 |
| Paper # | SDM2008-144,ICD2008-54 |
| Volume (vol) | vol.108 |
| Number (no) | 140 |
| Page | pp.pp.- |
| #Pages | 2 |
| Date of Issue | |