| Presentation | 2008-07-17 Present Status and Future Trend of Characteristic Variations in Scaled CMOS T. HIRAMOTO, K. Takeuchi, T. Tsunomura, Arifin T. Putra, A. Nishida, S. Kamohara, |
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| PDF Download Page |  PDF download Page Link |
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| Abstract(in Japanese) | (See Japanese page) | ||
| Abstract(in English) | The variability is one of the most critical issues for further miniaturization of MOS transistors. Although the variability may place the limit of MOS transistor scaling, the origins of characteristics variation of MOS transistors have not been fully understood. Intensive and extensive investigations have been performed in order to elucidate the origins of random variation in scaled MOSFETs in framework of the MIRAI Project. The main achievements are: (1) Designed 1M device-matrix-array TEG and found that V_ | distributions of both nFETs and pFETs show high normality in the range of ±5σ, (2) Developed a new normalization method of Vth fluctuations in terms not only of device size but also of V_ | and T_ |
| Keyword(in Japanese) | (See Japanese page) | ||
| Keyword(in English) | MOSFET / Variability / Threshold voltage / Random dopant fluctuation / Pelgrom plot / Takeuchi plot | ||
| Paper # | SDM2008-135,ICD2008-45 | ||
| Date of Issue |
| Conference Information | |
| Committee | ICD |
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| Conference Date | 2008/7/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Present Status and Future Trend of Characteristic Variations in Scaled CMOS |
| Sub Title (in English) | |
| Keyword(1) | MOSFET |
| Keyword(2) | Variability |
| Keyword(3) | Threshold voltage |
| Keyword(4) | Random dopant fluctuation |
| Keyword(5) | Pelgrom plot |
| Keyword(6) | Takeuchi plot |
| 1st Author's Name | T. HIRAMOTO |
| 1st Author's Affiliation | Institute of Industrial Science, University of Tokyo:MIRAI-Selete() |
| 2nd Author's Name | K. Takeuchi |
| 2nd Author's Affiliation | MIRAI-Selete |
| 3rd Author's Name | T. Tsunomura |
| 3rd Author's Affiliation | MIRAI-Selete |
| 4th Author's Name | Arifin T. Putra |
| 4th Author's Affiliation | Institute of Industrial Science, University of Tokyo |
| 5th Author's Name | A. Nishida |
| 5th Author's Affiliation | MIRAI-Selete |
| 6th Author's Name | S. Kamohara |
| 6th Author's Affiliation | MIRAI-Selete |
| Date | 2008-07-17 |
| Paper # | SDM2008-135,ICD2008-45 |
| Volume (vol) | vol.108 |
| Number (no) | 140 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |