Presentation 2008-02-15
Development of Simple ESD Checker and it's Application : Detection of ESD destroy phenomenon
Norio YAMASAKI, Masaru SANADA,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Simple Electro Static Discharge(ESD) tester has been developed for evaluating ESD sensitivity of LSI and studying ESD protection of it. The tester system consists of high voltage power supply, relay switch, and signal control circuit. Representative three types of electro static mode: Machine model, Human body model and Charged device model, are built in the system. The tester is applied to measure ESD sensitive value of commercially LSI, to fabricate fault LSI with ESD damage, and to evaluate TPL test for fault portion detection of IN-OUT put circuit.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) LSI / Electrostatic discharge(ESD) / EDS tester / Reliability / Failure analysis
Paper # R2007-59,EMD2007-114
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Committee EMD
Conference Date 2008/2/8(1days)
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Registration To Electromechanical Devices (EMD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Development of Simple ESD Checker and it's Application : Detection of ESD destroy phenomenon
Sub Title (in English)
Keyword(1) LSI
Keyword(2) Electrostatic discharge(ESD)
Keyword(3) EDS tester
Keyword(4) Reliability
Keyword(5) Failure analysis
1st Author's Name Norio YAMASAKI
1st Author's Affiliation Department of Electronic and Photonic Systems Engineering, Faculty of Engineering, Kochi University of Technology First University()
2nd Author's Name Masaru SANADA
2nd Author's Affiliation Department of Electronic and Photonic Systems Engineering, Faculty of Engineering, Kochi University of Technology First University
Date 2008-02-15
Paper # R2007-59,EMD2007-114
Volume (vol) vol.107
Number (no) 485
Page pp.pp.-
#Pages 5
Date of Issue