| Presentation | 2008/2/1 Pore-Connectivity Dependence of Moisture Absorption into Porous Low-k Films by Positron-Annihilation Lifetime Spectroscopy Fuminori ITO, Tsuneo TAKEUCHI, Hironori YAMAMOTO, Toshiyuki OHDAIRA, Ryoichi SUZUKI, Yoshihiro HAYASHI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The moisture absorption into porous low-k materials with various pore properties such as pore-size and pore-connectivity was investigated, using positron annihilation lifetime spectroscopy (PALS). By decreasing the pore-connectivity as well as the pore-size itself, the porous low-k films showed the strong resistance to moisture absorption, even after severe humid condition such as pressure-cooker-test (PCT). The reduction of pore-connectivity toward the closed-pore is quite effective to control the highly reliable porous films toward 45-nm-node and beyond. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Cu interconnect / Low-k film / Porous film / Pore / Moisture absorption / Positron annihilation |
| Paper # | SDM2007-268 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2008/2/1(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Pore-Connectivity Dependence of Moisture Absorption into Porous Low-k Films by Positron-Annihilation Lifetime Spectroscopy |
| Sub Title (in English) | |
| Keyword(1) | Cu interconnect |
| Keyword(2) | Low-k film |
| Keyword(3) | Porous film |
| Keyword(4) | Pore |
| Keyword(5) | Moisture absorption |
| Keyword(6) | Positron annihilation |
| 1st Author's Name | Fuminori ITO |
| 1st Author's Affiliation | Device Platforms Research Labs., NEC Corporation() |
| 2nd Author's Name | Tsuneo TAKEUCHI |
| 2nd Author's Affiliation | Device Platforms Research Labs., NEC Corporation |
| 3rd Author's Name | Hironori YAMAMOTO |
| 3rd Author's Affiliation | Device Platforms Research Labs., NEC Corporation |
| 4th Author's Name | Toshiyuki OHDAIRA |
| 4th Author's Affiliation | Advanced Industrial Science and Technology (AIST) |
| 5th Author's Name | Ryoichi SUZUKI |
| 5th Author's Affiliation | Advanced Industrial Science and Technology (AIST) |
| 6th Author's Name | Yoshihiro HAYASHI |
| 6th Author's Affiliation | Device Platforms Research Labs., NEC Corporation |
| Date | 2008/2/1 |
| Paper # | SDM2007-268 |
| Volume (vol) | vol.107 |
| Number (no) | 481 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |