| Presentation | 2008/2/1 32nm世代以降の高信頼多層配線に向けた超薄膜バリア技術(配線・実装技術と関連材料技術) , |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | SDM2007-265 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2008/2/1(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | |
| 1st Author's Affiliation | () |
| Date | 2008/2/1 |
| Paper # | SDM2007-265 |
| Volume (vol) | vol.107 |
| Number (no) | 481 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |