Presentation 2008-05-09
Electrochemical Properties of Thin-Film Lithium Secondary Batteries Using Positive LiCoO_2 Films Prepared by ECR Sputtering Method
Masahiko HAYASHI, Masaya TAKAHASHI, Takahisa SHODAI,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Well-crystallized positive LiCoO_2 films for thin-film lithium secondary batteries were obtained without a post-annealing process by employing an electron cyclotron resonance (ECR) plasma sputtering method as a novel deposition technique. The thin-film batteries were fabricated by depositing a LiPON electrolyte film and a negative Li film in sequence on the positive LiCoO_2 film. The batteries exhibited large energy densities of about 1 mWh/cm^2 and good charge/discharge cycle performance. The utilization of the positive film, which was estimated from the discharge capacities of the batteries, was about 60 %, and consequently the film was found to contain a large amount of inactive Co_3O_4 impurity phase. The positive film was prepared by using a Li-excess Li_<2.0>CoO_2 (a mixture of LiCoO_2 and Li_2CO_3) target to increase the utilization of the positive film. The films thus obtained were stoichiometric LiCoO_2 phase films that exhibited a utilization of almost 100%.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Thin-film lithium secondary batteries / lithium cobaltite (LiCoO_2) / electron cyclotron resonance (ECR) plasma sputtering method / high energy density
Paper # EE2008-1
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Conference Information
Committee EE
Conference Date 2008/5/2(1days)
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Registration To Energy Engineering in Electronics and Communications (EE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Electrochemical Properties of Thin-Film Lithium Secondary Batteries Using Positive LiCoO_2 Films Prepared by ECR Sputtering Method
Sub Title (in English)
Keyword(1) Thin-film lithium secondary batteries
Keyword(2) lithium cobaltite (LiCoO_2)
Keyword(3) electron cyclotron resonance (ECR) plasma sputtering method
Keyword(4) high energy density
1st Author's Name Masahiko HAYASHI
1st Author's Affiliation NTT Energy and Environment Systems Laboratories, Nippon Telegraph and Telephone Corporation()
2nd Author's Name Masaya TAKAHASHI
2nd Author's Affiliation NTT Energy and Environment Systems Laboratories, Nippon Telegraph and Telephone Corporation
3rd Author's Name Takahisa SHODAI
3rd Author's Affiliation NTT Energy and Environment Systems Laboratories, Nippon Telegraph and Telephone Corporation
Date 2008-05-09
Paper # EE2008-1
Volume (vol) vol.108
Number (no) 25
Page pp.pp.-
#Pages 6
Date of Issue