| Presentation | 2008-05-16 Dislocation in AlGaN grown on grooved AlN Toshiaki MORI, Toshiaki ASAI, Kentaro NAGAMATSU, Motoaki IWAYA, Satoshi KAMIYAMA, Hiroshi AMANO, Isamu AKASAKI, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | To realize high efficiency UV LED and LD with emission wavelength shorter than 360nm, low dislocation density AlGaN underlying layer is essential. In this study, compositional dependence of the crystalline quality of AlGaN on AlN template with or without groove structure was investigated using transmission electron micrography. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | AlGaN / AlN / Sapphire / TEM / Dislocation / MOVPE |
| Paper # | ED2008-12,CPM2008-20,SDM2008-32 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2008/5/8(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Dislocation in AlGaN grown on grooved AlN |
| Sub Title (in English) | |
| Keyword(1) | AlGaN |
| Keyword(2) | AlN |
| Keyword(3) | Sapphire |
| Keyword(4) | TEM |
| Keyword(5) | Dislocation |
| Keyword(6) | MOVPE |
| 1st Author's Name | Toshiaki MORI |
| 1st Author's Affiliation | Department of Materials Science and Engineering, Meijo University() |
| 2nd Author's Name | Toshiaki ASAI |
| 2nd Author's Affiliation | Department of Materials Science and Engineering, Meijo University |
| 3rd Author's Name | Kentaro NAGAMATSU |
| 3rd Author's Affiliation | Department of Materials Science and Engineering, Meijo University |
| 4th Author's Name | Motoaki IWAYA |
| 4th Author's Affiliation | Department of Materials Science and Engineering, Meijo University |
| 5th Author's Name | Satoshi KAMIYAMA |
| 5th Author's Affiliation | Department of Materials Science and Engineering, Meijo University |
| 6th Author's Name | Hiroshi AMANO |
| 6th Author's Affiliation | Department of Materials Science and Engineering, Meijo University |
| 7th Author's Name | Isamu AKASAKI |
| 7th Author's Affiliation | Department of Materials Science and Engineering, Meijo University |
| Date | 2008-05-16 |
| Paper # | ED2008-12,CPM2008-20,SDM2008-32 |
| Volume (vol) | vol.108 |
| Number (no) | 36 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |