Presentation 2008-05-16
Iodine doping of CdTe Layers Grown on Si substrates by MOVPE (II)
Hatasu Ichihashi, Wataru Yamada, Yasuhiro Kai, Akinobu Watanabe, Tomoya Nakanishi, Hiroki Oka, Hajime Nakashima, Yasunori Agata, Madan Niraula, Kazuhito Yasuda,
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Abstract(in English) Growth characteristics of high resistive CdTe layers by metal-organic vapor phase epitaxy have been studied. Layers were grown using dimethylcadmium (DMCd) and diethyltelluride (DETe) at growth temperature of 510℃ and 610℃, where ethyliodine (EI) was a dopant. At the supply rate ratio of DETe to DMCd (VI/II ratio) of 3.0, the resistivity of layers increased abruptly at the supply rate of EI above 1.0×10^<-6> mol/min. When the VI/II ratio was decreased to 1.0, the increase of the resistivity shifted to occur at lower supply rate of EI. The mechanisms of the high resistivity were also discussed.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) MOVPE / high resistive CdTe / Iodine doping / CdTe on Si substrate
Paper # ED2008-18,CPM2008-26,SDM2008-38
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Committee CPM
Conference Date 2008/5/8(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Iodine doping of CdTe Layers Grown on Si substrates by MOVPE (II)
Sub Title (in English)
Keyword(1) MOVPE
Keyword(2) high resistive CdTe
Keyword(3) Iodine doping
Keyword(4) CdTe on Si substrate
1st Author's Name Hatasu Ichihashi
1st Author's Affiliation Department of Engineering Physics, Electronics and Mechanics, Graduate School of Engineering, Nagoya Institute of Technology()
2nd Author's Name Wataru Yamada
2nd Author's Affiliation Department of Engineering Physics, Electronics and Mechanics, Graduate School of Engineering, Nagoya Institute of Technology
3rd Author's Name Yasuhiro Kai
3rd Author's Affiliation Department of Engineering Physics, Electronics and Mechanics, Graduate School of Engineering, Nagoya Institute of Technology
4th Author's Name Akinobu Watanabe
4th Author's Affiliation Department of Engineering Physics, Electronics and Mechanics, Graduate School of Engineering, Nagoya Institute of Technology
5th Author's Name Tomoya Nakanishi
5th Author's Affiliation Department of Engineering Physics, Electronics and Mechanics, Graduate School of Engineering, Nagoya Institute of Technology
6th Author's Name Hiroki Oka
6th Author's Affiliation Department of Engineering Physics, Electronics and Mechanics, Graduate School of Engineering, Nagoya Institute of Technology
7th Author's Name Hajime Nakashima
7th Author's Affiliation Department of Engineering Physics, Electronics and Mechanics, Graduate School of Engineering, Nagoya Institute of Technology
8th Author's Name Yasunori Agata
8th Author's Affiliation Department of Engineering Physics, Electronics and Mechanics, Graduate School of Engineering, Nagoya Institute of Technology
9th Author's Name Madan Niraula
9th Author's Affiliation Department of Engineering Physics, Electronics and Mechanics, Graduate School of Engineering, Nagoya Institute of Technology
10th Author's Name Kazuhito Yasuda
10th Author's Affiliation Department of Engineering Physics, Electronics and Mechanics, Graduate School of Engineering, Nagoya Institute of Technology
Date 2008-05-16
Paper # ED2008-18,CPM2008-26,SDM2008-38
Volume (vol) vol.108
Number (no) 35
Page pp.pp.-
#Pages 4
Date of Issue