| Presentation | 2008-05-16 Lateral growth of GaAs (001) microchannel epitaxy grown by temperature difference method Yasumasa Tejima, Kenshiro Suzuki, Shigeya Naritsuka, Takahiro Maruyama, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Microchannel epitaxy (MCE) is a suitable technique to reduce dislocations in the heteroepitaxy with a large lattice mismatch. In MCE, for example, the growth of the dislocation-free areas of GaAs on Si substrates is obtainted. However, in an ordinary LPE technique, there is a limit in expanding the dislocation-free areas. Therefore, we used the temperature difference method, by which the continuous growth is possible. To make a temperature difference, H_2 is directly blown from the backside of the substrate. In this study, the growth condition for the lateral growth using temperature difference method in MCE is investigated. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Microchannel epitaxy / GaAs / Dislocation-free / Liquid phase epitaxy / Heteroepitaxy |
| Paper # | ED2008-15,CPM2008-23,SDM2008-35 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2008/5/8(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Lateral growth of GaAs (001) microchannel epitaxy grown by temperature difference method |
| Sub Title (in English) | |
| Keyword(1) | Microchannel epitaxy |
| Keyword(2) | GaAs |
| Keyword(3) | Dislocation-free |
| Keyword(4) | Liquid phase epitaxy |
| Keyword(5) | Heteroepitaxy |
| 1st Author's Name | Yasumasa Tejima |
| 1st Author's Affiliation | Science & Engineering, Meijo University() |
| 2nd Author's Name | Kenshiro Suzuki |
| 2nd Author's Affiliation | Science & Engineering, Meijo University |
| 3rd Author's Name | Shigeya Naritsuka |
| 3rd Author's Affiliation | Science & Engineering, Meijo University |
| 4th Author's Name | Takahiro Maruyama |
| 4th Author's Affiliation | Science & Engineering, Meijo University |
| Date | 2008-05-16 |
| Paper # | ED2008-15,CPM2008-23,SDM2008-35 |
| Volume (vol) | vol.108 |
| Number (no) | 35 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |