| Presentation | 2008-05-15 Preparation of TiO_2 films by RF magnetron sputtering method Tatsuya ENDO, Yuichi MIZUCHI, Masaaki ISAI, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | TiO_2 films have been focused as a photocatalyst. They have remarkable properties, for example, to resolute organic pollutant and to give hydrophobicity by irradiating near-ultra-violet-light. In the conventional preparation processes, a heating process should be used to improve their crystallinity and films are easily peeled from substrates. This research is aimed to prepare TiO_2 films on slide-glass substrates at room temperature by using magnetron sputtering method. TiO_2 powder was used as a target material. Ar gas was used as a sputtering atmosphere. Variations of crystal properties and morphology were investigated as a function of substrate temperature. It was found that Anatase-type films could be prepared at room temperature. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | TiO_2 thin film / RF magnetron sputtering / photocatalyst / low temperature preparation |
| Paper # | ED2008-6,CPM2008-14,SDM2008-26 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
|---|---|
| Conference Date | 2008/5/8(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Preparation of TiO_2 films by RF magnetron sputtering method |
| Sub Title (in English) | |
| Keyword(1) | TiO_2 thin film |
| Keyword(2) | RF magnetron sputtering |
| Keyword(3) | photocatalyst |
| Keyword(4) | low temperature preparation |
| 1st Author's Name | Tatsuya ENDO |
| 1st Author's Affiliation | Graduate School of Engineering, Shizuoka University() |
| 2nd Author's Name | Yuichi MIZUCHI |
| 2nd Author's Affiliation | Faculty of Engineering, Shizuoka University |
| 3rd Author's Name | Masaaki ISAI |
| 3rd Author's Affiliation | Graduate School of Engineering, Shizuoka University:Faculty of Engineering, Shizuoka University |
| Date | 2008-05-15 |
| Paper # | ED2008-6,CPM2008-14,SDM2008-26 |
| Volume (vol) | vol.108 |
| Number (no) | 35 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |