| Presentation | 2008-05-15 Preparation of β-Ga_2O_3 films by RF magnetron sputtering method Takashi HORIUCHI, Masaaki ISAI, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Interest for environmental problems has been growing these days. Gallium oxide have been focused as an oxygen (O_2) gas sensor which is used for controlling exhausted gases at high temperature. These films were deposited by a RF magnetron sputtering. The effects of annealing process and O_2 gas flow rate on crystallinity were investigated. As a result, it was found that the crystallinity was improved after annealing process. It was also found that high quality films could be prepared under the Ar:O_2 flow rate of 5:1 at the total gas pressure of 2.4sccm. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Gallium oxide / Metal oxides / Magnetron sputtering method / Rapid thermal annealing (RTA) / Oxygen sensor |
| Paper # | ED2008-5,CPM2008-13,SDM2008-25 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2008/5/8(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Preparation of β-Ga_2O_3 films by RF magnetron sputtering method |
| Sub Title (in English) | |
| Keyword(1) | Gallium oxide |
| Keyword(2) | Metal oxides |
| Keyword(3) | Magnetron sputtering method |
| Keyword(4) | Rapid thermal annealing (RTA) |
| Keyword(5) | Oxygen sensor |
| 1st Author's Name | Takashi HORIUCHI |
| 1st Author's Affiliation | Graduate School of Engineering, Shizuoka University() |
| 2nd Author's Name | Masaaki ISAI |
| 2nd Author's Affiliation | Graduate School of Engineering, Shizuoka University:Faculty of Engineering, Shizuoka University |
| Date | 2008-05-15 |
| Paper # | ED2008-5,CPM2008-13,SDM2008-25 |
| Volume (vol) | vol.108 |
| Number (no) | 35 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |