Presentation 2008-05-15
Preparation of LiMn_2O_4 films by RF magnetron sputtering
Koichi Nakamura, Takayuki Hosokawa, Satoshi Sakai, Shunsuke Hosoe, Masaaki Isai,
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Abstract(in English) Manganese oxides have been focused as a cathode material for Li secondary batteries. Preparation of LiMn_2O_4 thin films were tried by using a reactive sputtering method. The reactive sputtering method was used to compensate the oxygen deficiency of LiMn_2O_4 films during sputtering process. It was intended to prepare the LiMn_2O_4 films with stoichiometry.
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Keyword(in English) Li secondary batteries / LiMn_2O_4 thin film / RF magnetron sputtering
Paper # ED2008-2,CPM2008-10,SDM2008-22
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Conference Information
Committee CPM
Conference Date 2008/5/8(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Preparation of LiMn_2O_4 films by RF magnetron sputtering
Sub Title (in English)
Keyword(1) Li secondary batteries
Keyword(2) LiMn_2O_4 thin film
Keyword(3) RF magnetron sputtering
1st Author's Name Koichi Nakamura
1st Author's Affiliation Graduate School of Faculty of Engineering, Shizuoka University()
2nd Author's Name Takayuki Hosokawa
2nd Author's Affiliation Graduate School of Faculty of Engineering, Shizuoka University
3rd Author's Name Satoshi Sakai
3rd Author's Affiliation Faculty of Engineering, Shizuoka University
4th Author's Name Shunsuke Hosoe
4th Author's Affiliation Faculty of Engineering, Shizuoka University
5th Author's Name Masaaki Isai
5th Author's Affiliation Faculty of Engineering, Shizuoka University:Graduate School of Faculty of Engineering, Shizuoka University
Date 2008-05-15
Paper # ED2008-2,CPM2008-10,SDM2008-22
Volume (vol) vol.108
Number (no) 35
Page pp.pp.-
#Pages 4
Date of Issue