| Presentation | 2008-05-15 Effect of doughnut-type plate on crystal properties of LiMn_2O_4 films prepared by RF magnetron sputtering Takayuki HOSOKAWA, Kouichi NAKAMURA, Shunsuke HOSOE, Satoshi SAKAI, Masaaki ISAI, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The LiMn_2O_4 films for Li secondary batteries have been prepared by a RF magnetron sputtering method. The LiMn_2O_4 powder was used as a target material. This research was designed for preventing the target material being oxidized during the reactive sputtering. A doughnut plate was inserted between substrate and target. The deposition rate, XRD, and surface morphology were investigated as a function of doughnut-aperture size. It was found that the deposition rate had a maximum value under the doughnut-aperture of 30mm. It was also found that the plate was effective to inhibit oxidation of target material. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | LiMn_2O_4 thin film / RF magnetron sputtering / Li secondary batteries |
| Paper # | ED2008-1,CPM2008-9,SDM2008-21 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2008/5/8(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Effect of doughnut-type plate on crystal properties of LiMn_2O_4 films prepared by RF magnetron sputtering |
| Sub Title (in English) | |
| Keyword(1) | LiMn_2O_4 thin film |
| Keyword(2) | RF magnetron sputtering |
| Keyword(3) | Li secondary batteries |
| 1st Author's Name | Takayuki HOSOKAWA |
| 1st Author's Affiliation | Graduate School of Engineering, Shizuoka University() |
| 2nd Author's Name | Kouichi NAKAMURA |
| 2nd Author's Affiliation | Graduate School of Engineering, Shizuoka University |
| 3rd Author's Name | Shunsuke HOSOE |
| 3rd Author's Affiliation | Faculty of Engineering, Shizuoka University |
| 4th Author's Name | Satoshi SAKAI |
| 4th Author's Affiliation | Faculty of Engineering, Shizuoka University |
| 5th Author's Name | Masaaki ISAI |
| 5th Author's Affiliation | Faculty of Engineering, Shizuoka University:Graduate School of Engineering, Shizuoka University |
| Date | 2008-05-15 |
| Paper # | ED2008-1,CPM2008-9,SDM2008-21 |
| Volume (vol) | vol.108 |
| Number (no) | 35 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |