| Presentation | 2008-04-12 Electron Microscopic Study of Low Temperature Crystallization of a-SiGe Thin Film Masaru ITAKURA, Masanobu MIYAO, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Microstructures of Si_<0.6>Ge_<0.4> films were investigated by using a transmission electron microscopy (TEM) in order to clarify the low temperature crystallization mechanism in the Ni-metal induced lateral crystallization (Ni-MILC) process. In the specimen annealed at 450 ℃, narrow needlelike Si_<0.6>Ge_<0.4> crystallites about 30 nm in width are formed and a hemispherical Ni (Si_<1-x>Ge_x) nodule was recognized at each crystallization front. At 550 ℃, on the other hand, dendritic crystals composed of many SiGe grains about 200 nm in diameter was observed in the MILC region. In addition, needlelike crystallites were also found to penetrate the center of the dendritic aggregates. These results suggest that the needlelike SiGe crystallites are formed first in association with the formation and migration of Ni (Si_<1-x>Ge_x) precipitate, and subsequently SiGe grains are crystallized on the needlelike crystallites by the spontaneous nucleation and growth. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MILC process / Si-Ge thin films / Ni-monogermanosilicide / Transmission electron microscopy |
| Paper # | SDM2008-16,OME2008-16 |
| Date of Issue |
| Conference Information | |
| Committee | OME |
|---|---|
| Conference Date | 2008/4/4(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Electron Microscopic Study of Low Temperature Crystallization of a-SiGe Thin Film |
| Sub Title (in English) | |
| Keyword(1) | MILC process |
| Keyword(2) | Si-Ge thin films |
| Keyword(3) | Ni-monogermanosilicide |
| Keyword(4) | Transmission electron microscopy |
| 1st Author's Name | Masaru ITAKURA |
| 1st Author's Affiliation | Faculty of Engineering Sciences, Kyushu University() |
| 2nd Author's Name | Masanobu MIYAO |
| 2nd Author's Affiliation | Faculty of Information Science and Electrical Engineering, Kyushu University |
| Date | 2008-04-12 |
| Paper # | SDM2008-16,OME2008-16 |
| Volume (vol) | vol.108 |
| Number (no) | 2 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |