| Presentation | 2008-04-11 Improvement of Interface Property in Pentacene TFT by Atomic Hydrogen Annealing Akira HEYA, Masahiko SATO, Hiroshi HASEGAWA, Naoto MATSUO, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We tried to improve electrical properties of organic thin-film transistors (OTFTs) by atomic hydrogen annealing (AHA). In this method, the gate insulator (SiO_2) was exposed to atomic hydrogens generated by cracking of hydrogen molecules on heated tungsten wire. The surface properties of SiO_2 were changed by AHA. For the pentacene OTFT fabricated on SiO_2/Si substrate, the on/off ratio was improved from 10 to 100 and the threshold voltage was decreased from 65 to 16 V by AHA. It is considered that the negative charges at interface of SiO_2 film and Si substrate were removed by atomic hydrogens. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | atomic hydrogen annealing / organic thin film transistor / pentacene / interface property |
| Paper # | SDM2008-13,OME2008-13 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2008/4/4(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Improvement of Interface Property in Pentacene TFT by Atomic Hydrogen Annealing |
| Sub Title (in English) | |
| Keyword(1) | atomic hydrogen annealing |
| Keyword(2) | organic thin film transistor |
| Keyword(3) | pentacene |
| Keyword(4) | interface property |
| 1st Author's Name | Akira HEYA |
| 1st Author's Affiliation | University of Hyogo() |
| 2nd Author's Name | Masahiko SATO |
| 2nd Author's Affiliation | University of Hyogo |
| 3rd Author's Name | Hiroshi HASEGAWA |
| 3rd Author's Affiliation | University of Hyogo |
| 4th Author's Name | Naoto MATSUO |
| 4th Author's Affiliation | University of Hyogo |
| Date | 2008-04-11 |
| Paper # | SDM2008-13,OME2008-13 |
| Volume (vol) | vol.108 |
| Number (no) | 2 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |