| Presentation | 2008-04-11 Clarification of ITO/AlNiNd contact formation mechanism Kazumasa Kawase, Tsukasa Motoya, Junji Tanimura, Naoki Tsumura, Kensuke Nagayama, Nobuaki Ishiga, Kazunori Inoue, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The chemical bonding state, crystallized state and element distribution near ITO/AlNiNd interface are investigated. In the case of without post annealing after AlNiNd sputtering, uniform Al_2O_3 layer is grown during ITO sputtering process and electric contact is not formed. In the case of with post annealing, Al_3Ni crystal grains are formed and those are not oxidized during ITO sputtering process. ITO/AlNiNd direct electric contact is fabricated because electric current flows through the Al_3Ni crystal grains. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | TFT / contact / AlNi / AlNd / ITO / XPS / TEM / EDX / XD |
| Paper # | SDM2008-8,OME2008-8 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2008/4/4(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Clarification of ITO/AlNiNd contact formation mechanism |
| Sub Title (in English) | |
| Keyword(1) | TFT |
| Keyword(2) | contact |
| Keyword(3) | AlNi |
| Keyword(4) | AlNd |
| Keyword(5) | ITO |
| Keyword(6) | XPS |
| Keyword(7) | TEM |
| Keyword(8) | EDX |
| Keyword(9) | XD |
| 1st Author's Name | Kazumasa Kawase |
| 1st Author's Affiliation | Advanced Technology R&D Center, Mitsubishi Electric Corporation() |
| 2nd Author's Name | Tsukasa Motoya |
| 2nd Author's Affiliation | Advanced Technology R&D Center, Mitsubishi Electric Corporation |
| 3rd Author's Name | Junji Tanimura |
| 3rd Author's Affiliation | Advanced Technology R&D Center, Mitsubishi Electric Corporation |
| 4th Author's Name | Naoki Tsumura |
| 4th Author's Affiliation | Melco Display Technology Inc. |
| 5th Author's Name | Kensuke Nagayama |
| 5th Author's Affiliation | Melco Display Technology Inc. |
| 6th Author's Name | Nobuaki Ishiga |
| 6th Author's Affiliation | Melco Display Technology Inc. |
| 7th Author's Name | Kazunori Inoue |
| 7th Author's Affiliation | Advanced Technology R&D Center, Mitsubishi Electric Corporation |
| Date | 2008-04-11 |
| Paper # | SDM2008-8,OME2008-8 |
| Volume (vol) | vol.108 |
| Number (no) | 2 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |