| Presentation | 2008-01-31 Proposal of CdTe X-ray image sensor driven by FEA with focusing electrode Yuichiro HANAWA, Takuya SAKATA, Takashi SODA, Gui HAN, Hisashi MORII, Katsumi MATSUBARA, Susumu YAMASHITA, Masayoshi NAGAO, Seigo KANEMARU, Yoichiro NEO, Toru AOKI, Hidenori MIMURA, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We proposed a novel CdTe X-ray image sensor, which was driven by the FEA, to obtain high spatial resolution X-ray images and have demonstrated the principle operation by using the CdTe image sensor with one pixel. We have also fabricated a FEA matrix with 12×12 pixels to obtain X-ray images. For the further improvement of spatial resolution in the CdTe image sensor, we have proposed a novel double-gated FEA with a focusing lens, which was fabricated by using the etch-back method. The double-gated FEA showed a good focusing characteristic without significant decrease of the emission current, when the height of the focus electrode was optimized. The CdTe image sensor driven by the double-gated FEA is promising for an ultra-high-resolution X-ray image sensor. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | CdTe X-ray image sensor / M-π-n structured CdTe diode / Matrix FEA / Double-gated FEA |
| Paper # | ED2007-246,SDM2007-257 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2008/1/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Proposal of CdTe X-ray image sensor driven by FEA with focusing electrode |
| Sub Title (in English) | |
| Keyword(1) | CdTe X-ray image sensor |
| Keyword(2) | M-π-n structured CdTe diode |
| Keyword(3) | Matrix FEA |
| Keyword(4) | Double-gated FEA |
| 1st Author's Name | Yuichiro HANAWA |
| 1st Author's Affiliation | Research Institute of Electronics, Shizuoka University() |
| 2nd Author's Name | Takuya SAKATA |
| 2nd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 3rd Author's Name | Takashi SODA |
| 3rd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 4th Author's Name | Gui HAN |
| 4th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 5th Author's Name | Hisashi MORII |
| 5th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 6th Author's Name | Katsumi MATSUBARA |
| 6th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 7th Author's Name | Susumu YAMASHITA |
| 7th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 8th Author's Name | Masayoshi NAGAO |
| 8th Author's Affiliation | National Institute of Advanced Industrial Science and Technology |
| 9th Author's Name | Seigo KANEMARU |
| 9th Author's Affiliation | National Institute of Advanced Industrial Science and Technology |
| 10th Author's Name | Yoichiro NEO |
| 10th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 11th Author's Name | Toru AOKI |
| 11th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 12th Author's Name | Hidenori MIMURA |
| 12th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| Date | 2008-01-31 |
| Paper # | ED2007-246,SDM2007-257 |
| Volume (vol) | vol.107 |
| Number (no) | 474 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |