Presentation 2008-01-30
MBE-VLS growth of GaAs nanowires on (111)Si substrate
Masahito YAMAGUCHI, Ji-Hyun Paek, Tatsuya NISHIWAKI, Yutaka YOSHIDA, Nobuhiko SAWAKI,
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Abstract(in English) We fabricated Au-catalyzed GaAs nanowires on (111)Si substrate by combination method of a solid source molecular beam epitaxy (MBE) and vapor-liquid-solid (VLS). In order to investigate the MBE-VLS combination growth mechanism, we grew GaAs nanowires under the various conditions and observed their shapes by Scanning Electron Microscopy (SEM). At the beginning of the growth, the growth rate was very fast and the diameter of nanowires was constant along the growth direction. On the other hand, the growth rate became slow and the diameters were tapered for a long growth time. When the V/III ratio was high, the uniform and narrow nanowires were grown. At the low V/III ratio, however, the wide nanowires were grown. These phenomena might be due to the migration of Ga adatoms along the wire side facets.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) VLS / MBE / GaAs Nanowire / Silicon substrate
Paper # ED2007-237,SDM2007-248
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Committee SDM
Conference Date 2008/1/23(1days)
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Registration To Silicon Device and Materials (SDM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) MBE-VLS growth of GaAs nanowires on (111)Si substrate
Sub Title (in English)
Keyword(1) VLS
Keyword(2) MBE
Keyword(3) GaAs Nanowire
Keyword(4) Silicon substrate
1st Author's Name Masahito YAMAGUCHI
1st Author's Affiliation Department of Electrical Engineering and Computer Science, Nagoya University()
2nd Author's Name Ji-Hyun Paek
2nd Author's Affiliation Department of Electrical Engineering and Computer Science, Nagoya University
3rd Author's Name Tatsuya NISHIWAKI
3rd Author's Affiliation Department of Electrical Engineering and Computer Science, Nagoya University
4th Author's Name Yutaka YOSHIDA
4th Author's Affiliation Department of Electrical Engineering and Computer Science, Nagoya University
5th Author's Name Nobuhiko SAWAKI
5th Author's Affiliation Department of Electrical Engineering and Computer Science, Nagoya University
Date 2008-01-30
Paper # ED2007-237,SDM2007-248
Volume (vol) vol.107
Number (no) 474
Page pp.pp.-
#Pages 4
Date of Issue