Presentation | 2008-01-17 Highly Reliable 0.5-μm-emitter InP/InGaAs HBT Norihide KASHIO, Kenji KURISHIMA, Yoshino K. FUKAI, Shoji YAMAHATA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We have developed 0.5-μm-emitter InP/InGaAs HBTs for 100-Gbit/s-class ICs. To boost f_t, the epitaxial layers of the HBT are thinned and the emitter width is scaled down to 0.5μm. To obtain high reliability, at a high collector current density, we used passivation ledge structures and tungsten-based emitter metal. The fabricated HBT exhibits a current gain of 58, an f_t of 321GHz, and an f_ |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | InP HBT / ledge structure / reliability |
Paper # | ED2007-218,MW2007-149 |
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Committee | ED |
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Conference Date | 2008/1/9(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Electron Devices (ED) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Highly Reliable 0.5-μm-emitter InP/InGaAs HBT |
Sub Title (in English) | |
Keyword(1) | InP HBT |
Keyword(2) | ledge structure |
Keyword(3) | reliability |
1st Author's Name | Norihide KASHIO |
1st Author's Affiliation | NTT Photonics Laboratories, NTT Corporation() |
2nd Author's Name | Kenji KURISHIMA |
2nd Author's Affiliation | NTT Photonics Laboratories, NTT Corporation |
3rd Author's Name | Yoshino K. FUKAI |
3rd Author's Affiliation | NTT Photonics Laboratories, NTT Corporation |
4th Author's Name | Shoji YAMAHATA |
4th Author's Affiliation | NTT Photonics Laboratories, NTT Corporation |
Date | 2008-01-17 |
Paper # | ED2007-218,MW2007-149 |
Volume (vol) | vol.107 |
Number (no) | 420 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |