Presentation 2008-01-17
Highly Reliable 0.5-μm-emitter InP/InGaAs HBT
Norihide KASHIO, Kenji KURISHIMA, Yoshino K. FUKAI, Shoji YAMAHATA,
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Abstract(in English) We have developed 0.5-μm-emitter InP/InGaAs HBTs for 100-Gbit/s-class ICs. To boost f_t, the epitaxial layers of the HBT are thinned and the emitter width is scaled down to 0.5μm. To obtain high reliability, at a high collector current density, we used passivation ledge structures and tungsten-based emitter metal. The fabricated HBT exhibits a current gain of 58, an f_t of 321GHz, and an f_ of 301GHz at a collector current density of 4mA/μm^2. The result of an accelerated life test shows that the activation energy is 1.5eV, and the extrapolated mean time to failure is estimated to be over 1x10^8h at a junction temperature of 125℃.
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Keyword(in English) InP HBT / ledge structure / reliability
Paper # ED2007-218,MW2007-149
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Committee ED
Conference Date 2008/1/9(1days)
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Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Highly Reliable 0.5-μm-emitter InP/InGaAs HBT
Sub Title (in English)
Keyword(1) InP HBT
Keyword(2) ledge structure
Keyword(3) reliability
1st Author's Name Norihide KASHIO
1st Author's Affiliation NTT Photonics Laboratories, NTT Corporation()
2nd Author's Name Kenji KURISHIMA
2nd Author's Affiliation NTT Photonics Laboratories, NTT Corporation
3rd Author's Name Yoshino K. FUKAI
3rd Author's Affiliation NTT Photonics Laboratories, NTT Corporation
4th Author's Name Shoji YAMAHATA
4th Author's Affiliation NTT Photonics Laboratories, NTT Corporation
Date 2008-01-17
Paper # ED2007-218,MW2007-149
Volume (vol) vol.107
Number (no) 420
Page pp.pp.-
#Pages 4
Date of Issue