| Presentation | 2008-01-25 Technical issues of etching process for Nb-junction circuit technology : Reactive ion etching (RIE) of Nb films Masaaki MAEZAWA, Fuminori HIRAYAMA, Sucheta GORWADKAR, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Reactive ion etching (RIE) techniques for Nb films are presented. We report in detail experimental results which were obtained during optimization of our standard Nb/AlO_x/Nb-junction technology for superconductor integrated circuits. Technical issues including dependence of etch depth on RIE time, controllability of pattern shifts and probability of intra-layer short defects are described. We also discuss possible damage to the junctions associated with plasma-induced currents during RIE processes. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Josephson junction / Rapid Single Flux Quantum / RSFQ / Superconductor circuit / RIE / Reactive ion etching |
| Paper # | SCE2007-30 |
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| Conference Information | |
| Committee | SCE |
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| Conference Date | 2008/1/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Superconductive Electronics (SCE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Technical issues of etching process for Nb-junction circuit technology : Reactive ion etching (RIE) of Nb films |
| Sub Title (in English) | |
| Keyword(1) | Josephson junction |
| Keyword(2) | Rapid Single Flux Quantum |
| Keyword(3) | RSFQ |
| Keyword(4) | Superconductor circuit |
| Keyword(5) | RIE |
| Keyword(6) | Reactive ion etching |
| 1st Author's Name | Masaaki MAEZAWA |
| 1st Author's Affiliation | AIST Tsukuba Central() |
| 2nd Author's Name | Fuminori HIRAYAMA |
| 2nd Author's Affiliation | AIST Tsukuba Central |
| 3rd Author's Name | Sucheta GORWADKAR |
| 3rd Author's Affiliation | AIST Tsukuba Central |
| Date | 2008-01-25 |
| Paper # | SCE2007-30 |
| Volume (vol) | vol.107 |
| Number (no) | 458 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |