| Presentation | 2008-01-25 Fabrication and Characteristics of Aluminum-based Superconducting Tunnel Junctions Kosuke Kamada, Tohru Taino, Hiromi Sato, Hiroaki Myoren, Susumu Takada, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We successfully fabricated the aluminum based superconducting tunnel junctions (Al-STJs) which used photolithography technique and dry etching process. Since it is not easy to dry etch the aluminum, we cannot form fine electrode pattern like shape of normal distribution function using the conventional reactive etching method. We took the inductively coupled plasma (ICP) on electrical discharge method and enabled dry etch the Al film. We could fabricate the Al-STJs by dry etching method with ICP. We fabricated STJ detectors with the shape of normal distribution function (σ=0.45) and junction sizes of 2,500μm^2 and 10,000μm^2. We measured I-V characteristic at 0.4K and obtained V_g=0.38mV, I_ |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Al / Superconducting Tunnel Junction(STJ) / photon detector |
| Paper # | SCE2007-28 |
| Date of Issue |
| Conference Information | |
| Committee | SCE |
|---|---|
| Conference Date | 2008/1/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Superconductive Electronics (SCE) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication and Characteristics of Aluminum-based Superconducting Tunnel Junctions |
| Sub Title (in English) | |
| Keyword(1) | Al |
| Keyword(2) | Superconducting Tunnel Junction(STJ) |
| Keyword(3) | photon detector |
| 1st Author's Name | Kosuke Kamada |
| 1st Author's Affiliation | Graduate School of Sci. and Eng., Saitama Univ.() |
| 2nd Author's Name | Tohru Taino |
| 2nd Author's Affiliation | Graduate School of Sci. and Eng., Saitama Univ. |
| 3rd Author's Name | Hiromi Sato |
| 3rd Author's Affiliation | RIKEN |
| 4th Author's Name | Hiroaki Myoren |
| 4th Author's Affiliation | Graduate School of Sci. and Eng., Saitama Univ. |
| 5th Author's Name | Susumu Takada |
| 5th Author's Affiliation | Graduate School of Sci. and Eng., Saitama Univ. |
| Date | 2008-01-25 |
| Paper # | SCE2007-28 |
| Volume (vol) | vol.107 |
| Number (no) | 458 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |