| Presentation | 2007-12-14 Interface modification by NH_3 plasma in SiN_x passivation for solar cell Yuki Kishiyama, Yu Takahashi, Akiyoshi Ogane, Athapol Kitiyanan, Yukiharu Uraoka, Takashi Fuyuki, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The effect of NH_3 plasma treatment on p-type (Fz) Si substrates was investigated relating with the post annealing process. NH_3 plasma treatment before the low temperature deposition of silicon nitride (SiN_x) by plasma-enhanced chemical vapor deposition (PECVD) was found to be effective to improve the surface passivation. The effective lifetime with NH_3 plasma-treatment exceeded the effective lifetime without the NH_3 treatment. For fire through process and the new process, like laser fired contacts (LFC), thermal resistance of passivation processes investigated. In the result of NH_3 plasma-treatment, outstanding surface passivation for high efficiency thin silicon solar cells was obtained using SiN films deposited at low temperatures. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Solar cell / SiN_x / Passivation / NH_3 plasma treatment |
| Paper # | SDM2007-232 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2007/12/7(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Interface modification by NH_3 plasma in SiN_x passivation for solar cell |
| Sub Title (in English) | |
| Keyword(1) | Solar cell |
| Keyword(2) | SiN_x |
| Keyword(3) | Passivation |
| Keyword(4) | NH_3 plasma treatment |
| 1st Author's Name | Yuki Kishiyama |
| 1st Author's Affiliation | Graduate school of material science, Nara Institute of Science and Technology() |
| 2nd Author's Name | Yu Takahashi |
| 2nd Author's Affiliation | Graduate school of material science, Nara Institute of Science and Technology |
| 3rd Author's Name | Akiyoshi Ogane |
| 3rd Author's Affiliation | Graduate school of material science, Nara Institute of Science and Technology |
| 4th Author's Name | Athapol Kitiyanan |
| 4th Author's Affiliation | Graduate school of material science, Nara Institute of Science and Technology |
| 5th Author's Name | Yukiharu Uraoka |
| 5th Author's Affiliation | Graduate school of material science, Nara Institute of Science and Technology |
| 6th Author's Name | Takashi Fuyuki |
| 6th Author's Affiliation | Graduate school of material science, Nara Institute of Science and Technology |
| Date | 2007-12-14 |
| Paper # | SDM2007-232 |
| Volume (vol) | vol.107 |
| Number (no) | 388 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |