Presentation 2007-12-14
Axial orientation of epitaxially grown Fe_3Si on Ge(111)
Yusuke HIRAIWA, Yu-ichiro ANDO, Mamoru KUMANO, Koji UEDA, Taizoh SADOH, Masanobu MIYAO, Kazumasa NARUMI, Yoshihito MAEDA,
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Abstract(in English) The axial orientation of epitaxially grown Fe_3Si on Ge(111) has been investigated by Rutherford Backscattering spectroscopy. It has been reported that the axial orientation is highly dependent on growth temperature (T_G), and that the degradation of axial orientation is caused above T_G=200℃. In this study, we have investigated the axial orientation of Fe_3Si/Ge(111) grown at 200℃ by electron diffraction and measurement of channel dip curves. We found that the degradation of axial orientation observed at T_G=200℃ was attributed mainly to the tilt of Fe_3Si<111> axis.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Epitaxial growth / Fe_3Si / Rutherford backscattering spectroscopy / Electron diffraction
Paper # SDM2007-230
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Committee SDM
Conference Date 2007/12/7(1days)
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Registration To Silicon Device and Materials (SDM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Axial orientation of epitaxially grown Fe_3Si on Ge(111)
Sub Title (in English)
Keyword(1) Epitaxial growth
Keyword(2) Fe_3Si
Keyword(3) Rutherford backscattering spectroscopy
Keyword(4) Electron diffraction
1st Author's Name Yusuke HIRAIWA
1st Author's Affiliation Department of Energy Science and Technology, Kyoto University()
2nd Author's Name Yu-ichiro ANDO
2nd Author's Affiliation Department of Electronics, Kyushu University
3rd Author's Name Mamoru KUMANO
3rd Author's Affiliation Department of Electronics, Kyushu University
4th Author's Name Koji UEDA
4th Author's Affiliation Department of Electronics, Kyushu University
5th Author's Name Taizoh SADOH
5th Author's Affiliation Department of Electronics, Kyushu University
6th Author's Name Masanobu MIYAO
6th Author's Affiliation Department of Electronics, Kyushu University
7th Author's Name Kazumasa NARUMI
7th Author's Affiliation Advanced Science Research Center, Japan Atomic Energy Agency
8th Author's Name Yoshihito MAEDA
8th Author's Affiliation Department of Energy Science and Technology, Kyoto University
Date 2007-12-14
Paper # SDM2007-230
Volume (vol) vol.107
Number (no) 388
Page pp.pp.-
#Pages 4
Date of Issue