Presentation | 2007-12-14 Axial orientation of epitaxially grown Fe_3Si on Ge(111) Yusuke HIRAIWA, Yu-ichiro ANDO, Mamoru KUMANO, Koji UEDA, Taizoh SADOH, Masanobu MIYAO, Kazumasa NARUMI, Yoshihito MAEDA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | The axial orientation of epitaxially grown Fe_3Si on Ge(111) has been investigated by Rutherford Backscattering spectroscopy. It has been reported that the axial orientation is highly dependent on growth temperature (T_G), and that the degradation of axial orientation is caused above T_G=200℃. In this study, we have investigated the axial orientation of Fe_3Si/Ge(111) grown at 200℃ by electron diffraction and measurement of channel dip curves. We found that the degradation of axial orientation observed at T_G=200℃ was attributed mainly to the tilt of Fe_3Si<111> axis. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Epitaxial growth / Fe_3Si / Rutherford backscattering spectroscopy / Electron diffraction |
Paper # | SDM2007-230 |
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Conference Information | |
Committee | SDM |
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Conference Date | 2007/12/7(1days) |
Place (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Silicon Device and Materials (SDM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Axial orientation of epitaxially grown Fe_3Si on Ge(111) |
Sub Title (in English) | |
Keyword(1) | Epitaxial growth |
Keyword(2) | Fe_3Si |
Keyword(3) | Rutherford backscattering spectroscopy |
Keyword(4) | Electron diffraction |
1st Author's Name | Yusuke HIRAIWA |
1st Author's Affiliation | Department of Energy Science and Technology, Kyoto University() |
2nd Author's Name | Yu-ichiro ANDO |
2nd Author's Affiliation | Department of Electronics, Kyushu University |
3rd Author's Name | Mamoru KUMANO |
3rd Author's Affiliation | Department of Electronics, Kyushu University |
4th Author's Name | Koji UEDA |
4th Author's Affiliation | Department of Electronics, Kyushu University |
5th Author's Name | Taizoh SADOH |
5th Author's Affiliation | Department of Electronics, Kyushu University |
6th Author's Name | Masanobu MIYAO |
6th Author's Affiliation | Department of Electronics, Kyushu University |
7th Author's Name | Kazumasa NARUMI |
7th Author's Affiliation | Advanced Science Research Center, Japan Atomic Energy Agency |
8th Author's Name | Yoshihito MAEDA |
8th Author's Affiliation | Department of Energy Science and Technology, Kyoto University |
Date | 2007-12-14 |
Paper # | SDM2007-230 |
Volume (vol) | vol.107 |
Number (no) | 388 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |