Presentation | 2007-12-14 Analysis of Capacitance-Voltage Characteristics of Poly-Si TFTs Using Device Simulation Tsuyoshi KUZUOKA, Hiroshi TSUJI, Masaharu KIRIHARA, Yoshinari KAMAKURA, Kenji TANIGUCHI, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Capacitance-voltage characteristics of short channel Poly-Si TFTs containing only a single grain boundary were investigated using a two-dimensional device simulator. It was demonstrated that the drain/source charge partition is significantly affected by the position of the grain boundary, which results, in the asymmetric characteristics of the gate-to-source (C_ |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | polysilicon / TFT / grain boundary / device simulation |
Paper # | SDM2007-225 |
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Conference Information | |
Committee | SDM |
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Conference Date | 2007/12/7(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Silicon Device and Materials (SDM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Analysis of Capacitance-Voltage Characteristics of Poly-Si TFTs Using Device Simulation |
Sub Title (in English) | |
Keyword(1) | polysilicon |
Keyword(2) | TFT |
Keyword(3) | grain boundary |
Keyword(4) | device simulation |
1st Author's Name | Tsuyoshi KUZUOKA |
1st Author's Affiliation | Graduate School of Engineering, Osaka University() |
2nd Author's Name | Hiroshi TSUJI |
2nd Author's Affiliation | Graduate School of Engineering, Osaka University |
3rd Author's Name | Masaharu KIRIHARA |
3rd Author's Affiliation | Graduate School of Engineering, Osaka University |
4th Author's Name | Yoshinari KAMAKURA |
4th Author's Affiliation | Graduate School of Engineering, Osaka University |
5th Author's Name | Kenji TANIGUCHI |
5th Author's Affiliation | Graduate School of Engineering, Osaka University |
Date | 2007-12-14 |
Paper # | SDM2007-225 |
Volume (vol) | vol.107 |
Number (no) | 388 |
Page | pp.pp.- |
#Pages | 4 |
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