| Presentation | 2007-11-02 Propagation loss reduction and sensitivity improvement of SOI-based high-mesa waveguide for compact breath-sensing system Kosuke KAMEYAMA, Yasunari MATSUNAGA, Kiichi HAMAMOTO, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | For the development of compact health-check devices, we have researched on breath-sensing system by using infrared absorption spectroscopy. The NLD (Magnetic Neutral Loop Discharge) plasma etching method was exploited for loss reduction to fabricating the high-mesa waveguides on SOI substrate. As a result, about 50% loss reduction was achieved compared to the waveguide fabricated by using conventional RIE (Reactive Ion Etching) method. Moreover, for improvement of the gas-phase light-distribution-ratio, we have improved the structure of multiply arrayed high-mesa waveguide, which is designed to use as sensing waveguides. As a result, high light-distribution-ratio of 89.3% was obtained in the structure of very narrow waveguide spacing of around 65nm with the waveguide with of around 200nm. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Optical waveguides / SOI-substrate / Photonic integrated circuit / multiply arrayed high-mesa waveguide / Bio-sensors / Breath-sensor |
| Paper # | OCS2007-57,OPE2007-112,LQE2007-98 |
| Date of Issue |
| Conference Information | |
| Committee | OCS |
|---|---|
| Conference Date | 2007/10/25(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Optical Communication Systems (OCS) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Propagation loss reduction and sensitivity improvement of SOI-based high-mesa waveguide for compact breath-sensing system |
| Sub Title (in English) | |
| Keyword(1) | Optical waveguides |
| Keyword(2) | SOI-substrate |
| Keyword(3) | Photonic integrated circuit |
| Keyword(4) | multiply arrayed high-mesa waveguide |
| Keyword(5) | Bio-sensors |
| Keyword(6) | Breath-sensor |
| 1st Author's Name | Kosuke KAMEYAMA |
| 1st Author's Affiliation | I-EggS (Interdisciplinary Graduate School of Engineering Sciences), Kyushu University() |
| 2nd Author's Name | Yasunari MATSUNAGA |
| 2nd Author's Affiliation | I-EggS (Interdisciplinary Graduate School of Engineering Sciences), Kyushu University |
| 3rd Author's Name | Kiichi HAMAMOTO |
| 3rd Author's Affiliation | I-EggS (Interdisciplinary Graduate School of Engineering Sciences), Kyushu University |
| Date | 2007-11-02 |
| Paper # | OCS2007-57,OPE2007-112,LQE2007-98 |
| Volume (vol) | vol.107 |
| Number (no) | 300 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |