| Presentation | 2007-11-17 Formation and control of Ge, SiC nanodots on Si(001)-2x1 surface using monomethylgermane Tomoaki Ogiwara, Haruki Sutou, Kanji Yasui, Tadashi Akahane, Masasuke Takata, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Formation of high-density nano-dots using monomethylgermane (MMGe) on Si(001)-2°off surface was investigated. By the pulse-controlled nucleation method, which changes the substrate temperature at low and high temperatures alternatively, uniform nanodots of 1.3x10^<12>cm^<-2> in density and 6nm in diameter, this dot size enable the quantum effect to occur, were successfully formed. From reflection high-energy electron diffraction (RHEED) and scanning tunneling microscopy (STM), the coexistence of Ge (SiGe) nanodots and SiC nanodots on the surface was confirmed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Ge nano-dot / SiC nano-dot / Monomethylgermane (MMGe) / STM / RHEED |
| Paper # | CPM2007-116 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2007/11/9(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Formation and control of Ge, SiC nanodots on Si(001)-2x1 surface using monomethylgermane |
| Sub Title (in English) | |
| Keyword(1) | Ge nano-dot |
| Keyword(2) | SiC nano-dot |
| Keyword(3) | Monomethylgermane (MMGe) |
| Keyword(4) | STM |
| Keyword(5) | RHEED |
| 1st Author's Name | Tomoaki Ogiwara |
| 1st Author's Affiliation | Department of Electrical Engineering, Nagaoka University of Technology() |
| 2nd Author's Name | Haruki Sutou |
| 2nd Author's Affiliation | Department of Electrical Engineering, Nagaoka University of Technology |
| 3rd Author's Name | Kanji Yasui |
| 3rd Author's Affiliation | Department of Electrical Engineering, Nagaoka University of Technology |
| 4th Author's Name | Tadashi Akahane |
| 4th Author's Affiliation | Department of Electrical Engineering, Nagaoka University of Technology |
| 5th Author's Name | Masasuke Takata |
| 5th Author's Affiliation | Department of Electrical Engineering, Nagaoka University of Technology |
| Date | 2007-11-17 |
| Paper # | CPM2007-116 |
| Volume (vol) | vol.107 |
| Number (no) | 325 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |