| Presentation | 2007-10-17 Optimization in ramp fabrication process for high-T_c ramp-edge Josephson junction Seiji ADACHI, Kaku IGARASHI, Kiyokazu HIGUCHI, Hironori WAKANA, Nobuyuki IWATA, Hiroshi YAMAMOTO, Keiichi TANABE, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | For fabrication of integrated circuits including high-T_c ramp-edge Josephson junctions, the establishment of preparation technique for many junctions with a small spread of properties in a chip is indispensable. It is considered that a difference in the ramp shape induces the spread. We refined a photolithography method for producing ramps having smooth surfaces without a tail structure and similar angles. The use of a thin resist film and the optimization of the resist reflowing parameters were found important to improve the method. We demonstrated fabrication of smooth ramps with a small spread in their angles using a mask pattern for a Toggle-Flip-flop circuit by employing the improved reflowing parameters. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Ramp-edge / Josephson junction / Photoresist / Reflow / AFM / Spread |
| Paper # | SCE2007-21 |
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| Conference Information | |
| Committee | SCE |
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| Conference Date | 2007/10/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Superconductive Electronics (SCE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Optimization in ramp fabrication process for high-T_c ramp-edge Josephson junction |
| Sub Title (in English) | |
| Keyword(1) | Ramp-edge |
| Keyword(2) | Josephson junction |
| Keyword(3) | Photoresist |
| Keyword(4) | Reflow |
| Keyword(5) | AFM |
| Keyword(6) | Spread |
| 1st Author's Name | Seiji ADACHI |
| 1st Author's Affiliation | SRL-ISTEC() |
| 2nd Author's Name | Kaku IGARASHI |
| 2nd Author's Affiliation | SRL-ISTEC |
| 3rd Author's Name | Kiyokazu HIGUCHI |
| 3rd Author's Affiliation | SRL-ISTEC |
| 4th Author's Name | Hironori WAKANA |
| 4th Author's Affiliation | SRL-ISTEC |
| 5th Author's Name | Nobuyuki IWATA |
| 5th Author's Affiliation | Nihon University |
| 6th Author's Name | Hiroshi YAMAMOTO |
| 6th Author's Affiliation | Nihon University |
| 7th Author's Name | Keiichi TANABE |
| 7th Author's Affiliation | SRL-ISTEC |
| Date | 2007-10-17 |
| Paper # | SCE2007-21 |
| Volume (vol) | vol.107 |
| Number (no) | 259 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |