| Presentation | 2007-10-12 Electrical Characterization of Homoepitaxially-Grown pn GaN Diodes Yutaka TOKUDA, Youichi MATSUOKA, Takeshi SEO, Hiroyuki UEDA, Osamu Ishiguro, Narimasa Soejima, Tetsu Kachi, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We report the electrical characterization of homoepitaxially-grown pn GaN by MOCVD on free-standing GaN substrates. The 10-μm n GaN (Si～2x10^<16> cm^<-3>) was grown on n^+ GaN, followed by the growth of the 1-μm p GaN (Mg～3x10^<19> cm^<-3>) or followed by the growth of the 0.5-μm p GaN (Mg～5x10^<18> cm^<-3>) and 0.1-μm p^+ GaN (Mg～1x10^<20> cm^<-3>).The mesa structures were fabricated by ICP etching. The wet etching after ICP improves the current-voltage characteristics. The admittance spectroscopy reveals the Mg-related peaks. DLTS measurements show two majority-carrier traps (0.26, 0.59eV) and one minority-carrier trap (0.89eV) with two unclear minority-carrier traps. The 0.89eV minority-carrier trap is dominant with the trap concentration of 1.3x10^<15> cm^<-3>. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | GaN / homoepitaxial growth / pn diodes / DLTS |
| Paper # | ED2007-173,CPM2007-99,LQE2007-74 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2007/10/4(1days) |
| Place (in Japanese) | (See Japanese page) |
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| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Electrical Characterization of Homoepitaxially-Grown pn GaN Diodes |
| Sub Title (in English) | |
| Keyword(1) | GaN |
| Keyword(2) | homoepitaxial growth |
| Keyword(3) | pn diodes |
| Keyword(4) | DLTS |
| 1st Author's Name | Yutaka TOKUDA |
| 1st Author's Affiliation | Aichi Institute of Technology() |
| 2nd Author's Name | Youichi MATSUOKA |
| 2nd Author's Affiliation | Aichi Institute of Technology |
| 3rd Author's Name | Takeshi SEO |
| 3rd Author's Affiliation | Aichi Institute of Technology |
| 4th Author's Name | Hiroyuki UEDA |
| 4th Author's Affiliation | Toyota Central Research & Development Laboratories Incorporation |
| 5th Author's Name | Osamu Ishiguro |
| 5th Author's Affiliation | Toyota Central Research & Development Laboratories Incorporation |
| 6th Author's Name | Narimasa Soejima |
| 6th Author's Affiliation | Toyota Central Research & Development Laboratories Incorporation |
| 7th Author's Name | Tetsu Kachi |
| 7th Author's Affiliation | Toyota Central Research & Development Laboratories Incorporation |
| Date | 2007-10-12 |
| Paper # | ED2007-173,CPM2007-99,LQE2007-74 |
| Volume (vol) | vol.107 |
| Number (no) | 253 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |