Presentation 2007-10-26
Fundamental Study on Bias Condition of a Co-Planar Waveguide with PZT Film
Kouji Shibata, Takashi Iijima, Youichiro Masuda,
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Abstract(in English) A Co-Planar waveguide was fabricated by depositing a 1μm-thick Au film on a multilayer dielectric that consists of a 2μm-thick PZT film over an Al_2O_3 substrate by etching process. Next, the reflection constant, transmission constant and phase variation as the bias voltage was varied from 30 to 50 volts of this transmission line were measured. As a result, it was confirmed that the phase variation becomes about 18degs at the frequency of 8GHz. Then, we confirmed the basic input-output characteristics of such a structure in the microwave band.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) CPW / PZT / Ferroelectric Substance / Phase Shifter / Transmission Line
Paper # EMCJ2007-72,MW2007-119
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Committee EMCJ
Conference Date 2007/10/18(1days)
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Registration To Electromagnetic Compatibility (EMCJ)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fundamental Study on Bias Condition of a Co-Planar Waveguide with PZT Film
Sub Title (in English)
Keyword(1) CPW
Keyword(2) PZT
Keyword(3) Ferroelectric Substance
Keyword(4) Phase Shifter
Keyword(5) Transmission Line
1st Author's Name Kouji Shibata
1st Author's Affiliation Department of Electric Intelligence and Systems, Hachinohe Institute of Technology()
2nd Author's Name Takashi Iijima
2nd Author's Affiliation AIST
3rd Author's Name Youichiro Masuda
3rd Author's Affiliation Hachinohe Institute of Technology
Date 2007-10-26
Paper # EMCJ2007-72,MW2007-119
Volume (vol) vol.107
Number (no) 278
Page pp.pp.-
#Pages 4
Date of Issue