| Presentation | 2007-09-28 Evaluation of ZnO Single Crystals by Means of the Ultrasonic Microspectroscopy Technology Tomoya TANAKA, Yuji OHASHI, Mototaka ARAKAWA, Jun-ichi KUSHIBIKI, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We conducted preliminary experiments for developing a new ultrasonic method of evaluating resisitivity distributions in ZnO single crystals using the line-focus-beam ultrasonic material characterization system. We measured velocities of leaky surface acoustic waves (LSAW) at 225 MHz on three Z-cut ZnO specimens A, B, and C with low, high, and unknown resistivities. We obtained the great velocity changes of more than 50 m/s caused by differences in resistivity from the results of 2616 m/s for specimen A and 2669 m/s for specimen B, and evaluated specimen C with velocity distributions from 2612 m/s around the seed part to 2672 m/s for the outside part associated with the crystal growth. To explain the experimental results obtained above, we theoretically investigated relationship between resistivity and velocity of Z-axis-polarized shear wave that was a main particle displacement component of the LSAW. We could estimate resistivities of the three specimens as follows: less than 1Ω・m for specimen A, about 1000Ω・m for specimen B, and over 1-1000Ω・m for specimen C. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ZnO single crystal / ultrasonic microspectroscopy technology / line-focus-beam/plane-wave ultrasonic material characterization system / leaky surface acoustic wave velocity / resistivity |
| Paper # | US2007-51 |
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| Committee | US |
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| Conference Date | 2007/9/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Ultrasonics (US) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Evaluation of ZnO Single Crystals by Means of the Ultrasonic Microspectroscopy Technology |
| Sub Title (in English) | |
| Keyword(1) | ZnO single crystal |
| Keyword(2) | ultrasonic microspectroscopy technology |
| Keyword(3) | line-focus-beam/plane-wave ultrasonic material characterization system |
| Keyword(4) | leaky surface acoustic wave velocity |
| Keyword(5) | resistivity |
| 1st Author's Name | Tomoya TANAKA |
| 1st Author's Affiliation | Graduate school of Engineering, Tohoku Univ.() |
| 2nd Author's Name | Yuji OHASHI |
| 2nd Author's Affiliation | Graduate school of Engineering, Tohoku Univ. |
| 3rd Author's Name | Mototaka ARAKAWA |
| 3rd Author's Affiliation | Graduate school of Engineering, Tohoku Univ. |
| 4th Author's Name | Jun-ichi KUSHIBIKI |
| 4th Author's Affiliation | Graduate school of Engineering, Tohoku Univ. |
| Date | 2007-09-28 |
| Paper # | US2007-51 |
| Volume (vol) | vol.107 |
| Number (no) | 233 |
| Page | pp.pp.- |
| #Pages | 6 |
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