| Presentation | 2007-10-31 Study of litho weak points detecting method using TCC's eigen vector Satoshi YOSHIKAWA, Hiroki FUTATSUYA, Tatsuo CHIJIMATSU, Satoru ASAI, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In this paper, we examined the method for detecting litho weak points using kernel derived from eigen vectors of Transmission Cross Coefficient (TCC). We regarded on that the aerial image can be expressed by the convolution-integral of amplitude of polygon's transmission and kernel, and utilized the relationship for hot-spot detection. We confirmed that detected features have fewer margins than undetected features by using the difference of ideal TCC and defocused TCC. Furthermore, we confirmed that experimental results show good agreement with our predictions. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | TCC / eigen vector / kernel / litho weak points |
| Paper # | VLD2007-63,SDM2007-207 |
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| Conference Information | |
| Committee | VLD |
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| Conference Date | 2007/10/24(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | VLSI Design Technologies (VLD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Study of litho weak points detecting method using TCC's eigen vector |
| Sub Title (in English) | |
| Keyword(1) | TCC |
| Keyword(2) | eigen vector |
| Keyword(3) | kernel |
| Keyword(4) | litho weak points |
| 1st Author's Name | Satoshi YOSHIKAWA |
| 1st Author's Affiliation | FUJITSU VLSI LIMITED() |
| 2nd Author's Name | Hiroki FUTATSUYA |
| 2nd Author's Affiliation | FUJITSU LIMITED |
| 3rd Author's Name | Tatsuo CHIJIMATSU |
| 3rd Author's Affiliation | FUJITSU LIMITED |
| 4th Author's Name | Satoru ASAI |
| 4th Author's Affiliation | FUJITSU LIMITED |
| Date | 2007-10-31 |
| Paper # | VLD2007-63,SDM2007-207 |
| Volume (vol) | vol.107 |
| Number (no) | 296 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |