Presentation 2007-08-02
Lumped element type MEMS 5-bit Phase Shifter
Yusuke KITSUKAWA, Tamotsu NISHINO, Masatake HANGAI, Sang-Seok LEE, Hiromoto INOUE, Yukihisa YOSHIDA, Moriyasu MIYAZAKI,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) In this report, a lumped element type MEMS 5-bit phase shifter is described. This MEMS 5-bit phase shifter is composed of switched capacitor type phase shift circuits for lower two bit sections and high pass/low pass type phase shift circuits for higher three bit sections. To downsize the MEMS phase shifter, these phase shift circuits use the lumped element fabricated by micromachining process. The fabricated 5-bit phase shifter performs maximum insertion loss of 6.8dB and RMS phase shift error of 8.2 degrees with die size of 5.1mm×1.2mm(6.12mm^2) in Ku-band.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) PHASE SHIFTER / RF-MEMS
Paper # MW2007-57,OPE2007-44
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Committee MW
Conference Date 2007/7/26(1days)
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Registration To Microwaves (MW)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Lumped element type MEMS 5-bit Phase Shifter
Sub Title (in English)
Keyword(1) PHASE SHIFTER
Keyword(2) RF-MEMS
1st Author's Name Yusuke KITSUKAWA
1st Author's Affiliation Mitsubishi Electric Co. Information Technology R&D Center()
2nd Author's Name Tamotsu NISHINO
2nd Author's Affiliation Mitsubishi Electric Co. Information Technology R&D Center
3rd Author's Name Masatake HANGAI
3rd Author's Affiliation Mitsubishi Electric Co. Information Technology R&D Center
4th Author's Name Sang-Seok LEE
4th Author's Affiliation Mitsubishi Electric Co. Advanced Technology R&D Center
5th Author's Name Hiromoto INOUE
5th Author's Affiliation Mitsubishi Electric Co. Advanced Technology R&D Center
6th Author's Name Yukihisa YOSHIDA
6th Author's Affiliation Mitsubishi Electric Co. Advanced Technology R&D Center
7th Author's Name Moriyasu MIYAZAKI
7th Author's Affiliation Mitsubishi Electric Co. Information Technology R&D Center
Date 2007-08-02
Paper # MW2007-57,OPE2007-44
Volume (vol) vol.107
Number (no) 172
Page pp.pp.-
#Pages 6
Date of Issue