| Presentation | 2007-08-02 Lumped element type MEMS 5-bit Phase Shifter Yusuke KITSUKAWA, Tamotsu NISHINO, Masatake HANGAI, Sang-Seok LEE, Hiromoto INOUE, Yukihisa YOSHIDA, Moriyasu MIYAZAKI, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In this report, a lumped element type MEMS 5-bit phase shifter is described. This MEMS 5-bit phase shifter is composed of switched capacitor type phase shift circuits for lower two bit sections and high pass/low pass type phase shift circuits for higher three bit sections. To downsize the MEMS phase shifter, these phase shift circuits use the lumped element fabricated by micromachining process. The fabricated 5-bit phase shifter performs maximum insertion loss of 6.8dB and RMS phase shift error of 8.2 degrees with die size of 5.1mm×1.2mm(6.12mm^2) in Ku-band. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | PHASE SHIFTER / RF-MEMS |
| Paper # | MW2007-57,OPE2007-44 |
| Date of Issue |
| Conference Information | |
| Committee | MW |
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| Conference Date | 2007/7/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Microwaves (MW) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Lumped element type MEMS 5-bit Phase Shifter |
| Sub Title (in English) | |
| Keyword(1) | PHASE SHIFTER |
| Keyword(2) | RF-MEMS |
| 1st Author's Name | Yusuke KITSUKAWA |
| 1st Author's Affiliation | Mitsubishi Electric Co. Information Technology R&D Center() |
| 2nd Author's Name | Tamotsu NISHINO |
| 2nd Author's Affiliation | Mitsubishi Electric Co. Information Technology R&D Center |
| 3rd Author's Name | Masatake HANGAI |
| 3rd Author's Affiliation | Mitsubishi Electric Co. Information Technology R&D Center |
| 4th Author's Name | Sang-Seok LEE |
| 4th Author's Affiliation | Mitsubishi Electric Co. Advanced Technology R&D Center |
| 5th Author's Name | Hiromoto INOUE |
| 5th Author's Affiliation | Mitsubishi Electric Co. Advanced Technology R&D Center |
| 6th Author's Name | Yukihisa YOSHIDA |
| 6th Author's Affiliation | Mitsubishi Electric Co. Advanced Technology R&D Center |
| 7th Author's Name | Moriyasu MIYAZAKI |
| 7th Author's Affiliation | Mitsubishi Electric Co. Information Technology R&D Center |
| Date | 2007-08-02 |
| Paper # | MW2007-57,OPE2007-44 |
| Volume (vol) | vol.107 |
| Number (no) | 172 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |