| Presentation | 2007-08-10 Implementation of Temperature Controlled Tunable Capacitor using Silicon Bimetal Atsuhiro SUZUKI, Tomochika HARADA, Sumio OKUYAMA, Hiroshi NAGANUMA, Koichi MATSUSHITA, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Recently, miniaturization of MEMS sensors are required in integrated circuits (IC) . As for a miniaturization method, it is reported that the pressure sensor is fabricated on its peripheral integrated circuits. By applying this technique to IC temperature sensors, we can achieve high-density device integration. In this study, as a fundamental study of miniaturized IC temperature sensors fabricated on peripheral integrated circuits, we present and fabricate the temperature controlled tunable capacitor using silicon and aluminum bimetal, and evaluate the temperature capacitance characteristics. As a result, it is shown that the capacitance with tunable silicon bimetal is more remarkable increased by increase of temperature than that without it. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | silicon / bimetal / capacitor / temperature sensor |
| Paper # | CPM2007-47 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
|---|---|
| Conference Date | 2007/8/2(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Implementation of Temperature Controlled Tunable Capacitor using Silicon Bimetal |
| Sub Title (in English) | |
| Keyword(1) | silicon |
| Keyword(2) | bimetal |
| Keyword(3) | capacitor |
| Keyword(4) | temperature sensor |
| 1st Author's Name | Atsuhiro SUZUKI |
| 1st Author's Affiliation | Faculty of Engineering, Yamagata University() |
| 2nd Author's Name | Tomochika HARADA |
| 2nd Author's Affiliation | Faculty of Engineering, Yamagata University |
| 3rd Author's Name | Sumio OKUYAMA |
| 3rd Author's Affiliation | Faculty of Engineering, Yamagata University |
| 4th Author's Name | Hiroshi NAGANUMA |
| 4th Author's Affiliation | Faculty of Engineering, Yamagata University |
| 5th Author's Name | Koichi MATSUSHITA |
| 5th Author's Affiliation | Faculty of Engineering, Yamagata University |
| Date | 2007-08-10 |
| Paper # | CPM2007-47 |
| Volume (vol) | vol.107 |
| Number (no) | 178 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |