| Presentation | 2007-08-10 Fabrication of the strain gauge integrated Si-diaphragm structure hydrogen gas sensor Yuta WATANABE, Sumio OKUYAMA, Tomochika HARADA, Koichi MATSUSHITA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We are developing a Si-diaphragm structure hydrogen gas sensor which detects the expansion of Pd thin film by the integrated strain gauge. The 2mm x 2mm x 350um silicon diaphragm was made using the p-type Si substrate by the anisotropic etching by tetramethylammnonium hydroxide (TMAH). The piezoresistance was produced by thermal diffusion of the phosphorus. In this paper, we report manufacture method and measurement result in introducing the hydrogen of the element. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | hydrogen / hydrogen gas sensor / silicon / micromachining |
| Paper # | CPM2007-44 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2007/8/2(1days) |
| Place (in Japanese) | (See Japanese page) |
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| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of the strain gauge integrated Si-diaphragm structure hydrogen gas sensor |
| Sub Title (in English) | |
| Keyword(1) | hydrogen |
| Keyword(2) | hydrogen gas sensor |
| Keyword(3) | silicon |
| Keyword(4) | micromachining |
| 1st Author's Name | Yuta WATANABE |
| 1st Author's Affiliation | Department of Electrical Engineering, Faculty of Engineering, Yamagata University() |
| 2nd Author's Name | Sumio OKUYAMA |
| 2nd Author's Affiliation | Department of Electrical Engineering, Faculty of Engineering, Yamagata University |
| 3rd Author's Name | Tomochika HARADA |
| 3rd Author's Affiliation | Department of Electrical Engineering, Faculty of Engineering, Yamagata University |
| 4th Author's Name | Koichi MATSUSHITA |
| 4th Author's Affiliation | Department of Electrical Engineering, Faculty of Engineering, Yamagata University |
| Date | 2007-08-10 |
| Paper # | CPM2007-44 |
| Volume (vol) | vol.107 |
| Number (no) | 178 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |